NDLI: Atmospheric pressure deposition of SnO and ZnO

Content Provider	IEEE Xplore Digital Library
Author	van Deelen, J. Kniknie, B. Grob, F. Volintiru, I. Roozeboom, F. Poodt, P. Illiberi, A.
Copyright Year	2012
Description	Author affiliation: TNO, PO Box 6235, 5600 HE Eindhoven, The Netherlands (van Deelen, J.; Kniknie, B.; Grob, F.; Volintiru, I.; Roozeboom, F.; Poodt, P.; Illiberi, A.)
Abstract	Transparent conductive oxide (TCO) coated glass is widely used in thin film PV. Atmospheric pressure chemical vapor deposition (APCVD) is a highly cost effective method of deposition and apart from metal precursor and oxygen precursor, other additives can improve the layer quality. In this contribution, we present an overview of the latest results on SnO and ZnO work. First, the beneficial effect of methanol addition is discussed. By adding methanol during the SnO deposition, the conductivity increased up to ten times, with remarkably high mobility values of up to 55 $cm^{2}/Vs.$ The films are already very conductive at a thickness below 10 nm. This is highly beneficial to applications with strict requirements in terms of film transparency. For ZnO:Al the APCVD process was developed with a deposition rate of 14 nm/s for one injector and resistivity values down to 0.6 mΩ cm. Low temperature APCVD ZnO was achieved by introducing remote plasma in the system. Deposition rate of 7 nm/s and resistivities of 2 mΩ cm were obtained. For spatial ALD, growth rates of ZnO were up to 1 nm/s and resistivities were of the order of 4 mΩ cm.
Starting Page	002014
Ending Page	002017
File Size	607453
Page Count	4
File Format	PDF
ISBN	9781467300643
ISSN	01608371
e-ISBN	9781467300667
DOI	10.1109/PVSC.2012.6317993
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-06-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Films Manganese Chemicals Zinc oxide Indexes Plasma temperature CVD transparent conductors transparent conductive oxides tinoxide zincoxide
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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