NDLI: Impact of back surface patterning process on FF in IBC-SHJ

Content Provider	IEEE Xplore Digital Library
Author	Lulu Zhang Shu, B. Birkmire, R. Hegedus, S. Das, U.
Copyright Year	2012
Description	Author affiliation: Institute of Energy Conversion, University of Delaware, Newark, USA (Lulu Zhang; Shu, B.; Birkmire, R.; Hegedus, S.; Das, U.)
Abstract	Based on potential high efficiency, low thermal budget and compatibility with very thin Si wafers, many research groups and industries are considering interdigitated all back contact silicon heterojunction (IBC-SHJ) solar cell technology. Compared to front junction silicon heterojunction (FJ-SHJ) solar cells, IBC-SHJ cells also have the unique advantages for simpler module integration. However, the IBC-SHJ solar cells to date suffer with low fill factors. Both simulation and experimental results have been conducted to understand the cause of the low FF. In this paper, the effects of processing conditions are discussed by comparing FJ-SHJ and IBC-SHJ solar cells. The fabrication of IBC-SHJ cells requires several photolithography steps to form the interdigitated back structure, whereas the FJ-SHJ requires no photolithography steps. The effect of processing temperatures, deposition sequence and photolithography processing are evaluated by using the FJ-SHJ as a test bed and base-line standard. Contamination and/or introduction of defects at intrinsic/doped layer interfaces resulting from photolithography steps is identified as one of the major contributors to reduced performance of IBC-SHJ devices fabricated using a low temperature process.
Starting Page	001177
Ending Page	001181
File Size	1048095
Page Count	5
File Format	PDF
ISBN	9781467300643
ISSN	01608371
e-ISBN	9781467300667
DOI	10.1109/PVSC.2012.6317811
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-06-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Photovoltaic cells Surface treatment Lithography Silicon Heterojunctions Resists Contamination photovoltaic cells silicon heterojunction surface contamination
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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