NDLI: Automated process metrology in solar cell manufacturing

Content Provider	IEEE Xplore Digital Library
Author	Velidandla, V. Garland, B. Cheung, F.
Copyright Year	2012
Description	Author affiliation: Zeta Instruments, San Jose, CA, USA (Velidandla, V.; Garland, B.) \|\| Tetrasun, Milpitas, CA, USA (Cheung, F.)
Abstract	Optimizing a solar cell manufacturing line must take into account a variety of issues. Wafers used for solar cells are typically thinner than those used in semiconductor IC manufacturing. This makes the solar cell wafers susceptible to surface and edge defects such as deep scratches and cracks. The wafer slicing operation can induce thickness non-uniformity as well as surface roughness variation. Wafer texturing (typically via etching) must result in an optimal pyramid height in the case of monocrystalline wafers and an optical grain size in the case of polycrystalline wafers. Silicon Nitride grown on the wafer can induce stress and eventual breakage of the wafer. An uneven nitride film can cause a drop in the overall efficiency of the wafer. The metal contact lines account for a significant cost in the production of a solar cell wafer. The process engineer must pay attention to the contact line height and width while minimizing the total amount of metal used. Based on all these requirements, an optical profiler, the Zeta-200, was developed to provide rapid and meaningful feedback to the process line. In this paper we present results from various process points in solar cell manufacturing, such as bare wafer roughness, silicon nitride film thickness and contact line dimensions.
Starting Page	000489
Ending Page	000495
File Size	5079257
Page Count	7
File Format	PDF
ISBN	9781467300643
ISSN	01608371
e-ISBN	9781467300667
DOI	10.1109/PVSC.2012.6317663
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-06-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Wires Surface treatment Photovoltaic cells Silicon Diamond-like carbon Rough surfaces Surface roughness
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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