NDLI: Metrology and process optimization for large area monolithically integrated Cu(In,Ga)Se modules

Content Provider	IEEE Xplore Digital Library
Author	Dingyuan Lu Christiansen, E.P. Walsh, C.W. Chase, J.F. Miller, R.M. Miller, M.F. Martinez, C.R. Sang, B. Stanbery, B.J.
Copyright Year	2012
Description	Author affiliation: HelioVolt Corporation, 6301-8 E. Stassney Lane, Austin, Texas, 78744-3055, USA (Dingyuan Lu; Christiansen, E.P.; Walsh, C.W.; Chase, J.F.; Miller, R.M.; Miller, M.F.; Martinez, C.R.; Sang, B.; Stanbery, B.J.)
Abstract	Cu(In,Ga)Se (CIGS) thin film photovoltaic (PV) is emerging from niche market status. However, it is still a challenge for manufacturers to realize CIGS's full potential as the most efficient thin film PV material for cost-effective manufacturing of large area monolithically integrated modules. Large area solar modules operate differently from small area cells due to the circuit structure and the complication from non-uniformities, analysis of which benefits from the use of specialized metrologies. We demonstrate that electroluminescence (EL) provides an effective and convenient way to explore device non-uniformities, defects and other features, which can be useful in process optimization for higher efficiency and yield. We have used this technique to diagnose and solve CdS buffer process problems. Changing chemical dispensing sequence has been used to eliminate excessive particle generation due to homogeneous nucleation. Mo scribe-through at P2 or P3 mechanical scribes affecting the device performance can also be easily identified with EL. Lower argon gas sputter pressure in the range of 3 – 13 mTorr has been tied to higher Mo film density and better scribe-through resistance resulting in reduced panel breakage during final lamination. Faster transport speed during Mo sputtering result in higher specular reflectance from the Mo surface and was optimized to eliminate CIGS peeling from Mo. A root cause for the peeling is proposed. Process optimization to address these issues identified by EL has enabled HelioVolt to achieve a recent baseline large area module efficiency of over 13% with yields of over 90%, and tight distributions providing a recent champion module efficiency of 13.7%.
Starting Page	001974
Ending Page	001977
File Size	907687
Page Count	4
File Format	PDF
ISBN	9781467300643
ISSN	01608371
e-ISBN	9781467300667
DOI	10.1109/PVSC.2012.6317983
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-06-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Metrology Optimization Films Surface treatment Chemicals Production monolithic integrated circuits CIGS thin film devices photovoltaic cells metrology electroluminescence
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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