NDLI: Protection of Si-SiO interfaces from damp heat by overlying SiN and Si coatings

Content Provider	IEEE Xplore Digital Library
Author	Xi Dai McIntosh, K.R.
Copyright Year	2010
Description	Author affiliation: Centre for Sustainable Energy Systems, Australian National University, Canberra, ACT 0200, AUSTRALIA (Xi Dai; McIntosh, K.R.)
Abstract	PECVD SiN antireflection coatings are found to suppress the degradation of an underlying oxide during “damp-heat” exposure. Samples are submitted to 85 °C and 85% relative humidity, replicating the damp-heat conditions of the standard reliability tests for PV modules. The samples are diffused with phosphorus and passivated with a thermal oxide, where the resistivity of the diffusion and the oxide thickness are similar to those used in many high-efficiency silicon solar cells. We find that when the samples are not coated with SiN, exposure to 1000 hours of damp-heat causes their emitter saturation current density J to increase from 32 to 53 $fA/cm^{2}$ on planar (100) wafers, and from 42 to 95 $fA/cm^{2}$ on textured wafers. We show that this degradation requires the presence of water vapour and does not occur due to the elevated temperature alone. These results suggest that high-efficiency silicon cells would fail the damp-heat reliability test if their SiO were not protected from the damp-heat. Happily, the degradation is strongly suppressed when the samples are coated with a PECVD SiN antireflection coating. This suggests that the SiN limits the diffusion of water vapour into the SiO. We also find that LPCVD Si suppresses damp-heat degradation although the results are less conclusive due to the initial J being many times higher than for PECVD SiN.
Starting Page	003205
Ending Page	003209
File Size	898648
Page Count	5
File Format	PDF
ISBN	9781424458905
ISSN	01608371
e-ISBN	9781424458929
DOI	10.1109/PVSC.2010.5616776
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-06-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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