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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zhiquan Huang Jie Chen Sestak, M.N. Attygalle, D. Dahal, L.R. Mapes, M.R. Strickler, D.A. Kormanyos, K.R. Salupo, C. Collins, R.W. |
| Copyright Year | 2010 |
| Description | Author affiliation: Calyxo USA, Inc., Perrysburg, OH 43551, USA (Kormanyos, K.R.) || On-Line Coatings Technology, NSG-Pilkington, Northwood, OH 43619, USA (Strickler, D.A.) || Center for Photovoltaics Innovation and Commercialization, University of Toledo, OH 43606, USA (Zhiquan Huang; Jie Chen; Sestak, M.N.; Attygalle, D.; Dahal, L.R.; Mapes, M.R.) |
| Abstract | The mapping capability of multichannel spectro-scopic ellipsometry (SE) has been demonstrated with examples from hydrogenated amorphous silicon (a-Si:H) and CdTe thin film photovoltaics (PV) technologies on glass. Maps as large as 40 x 80 $cm^{2}$ have been obtained. For a-Si:H, maps of the bulk i-layer thickness and band gap as well as surface roughness layer thickness have been determined. For CdTe, a map of the CdS window layer thickness has been determined with the prospect of grain structure mapping. In both cases, maps of the thickness and properties of the underlying transparent conducting oxide (TCO) layers have been determined. These first results demonstrate the ability of mapping SE to guide scale-up of thin film PV deposition processes. |
| Starting Page | 001678 |
| Ending Page | 001683 |
| File Size | 2723909 |
| Page Count | 6 |
| File Format | |
| ISBN | 9781424458905 |
| ISSN | 01608371 |
| e-ISBN | 9781424458929 |
| DOI | 10.1109/PVSC.2010.5616069 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2010-06-20 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering |
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