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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Chih-Liang Wang Wen-Chieh Shih Chia-Hsiang Chen Yi-Chang Chen Song-Fu Hong Chih-Pin Tsai Yung-Chung Wu Chih-Huang Lai |
| Copyright Year | 2010 |
| Description | Author affiliation: Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu, Taiwan 30013, Republic of China (Chih-Liang Wang; Wen-Chieh Shih; Chia-Hsiang Chen; Yi-Chang Chen; Song-Fu Hong; Chih-Pin Tsai; Yung-Chung Wu; Chih-Huang Lai) |
| Abstract | The effect of Al doping into Mo, used as the back electrodes of CuIn-based solar cells, was systematically investigated. The transitions of Mo films, where X represents 14at.%, 21at.%, 28at.% 34at.%, and 39at.%, from the Al solid solution in Mo films to the mixture of Al solid solution in Mo films and the amorphous Mo-Al regions were fabricated by using co-sputtering from the Al and Mo target. When the Al content below 14at.%, the Al solid solution with Mo polycrystalline films was observed. In the content of Al from 14at.% to 39at.%, the analysis of XRD and SEM revealed that Mo-Al films become the microstructures of Al solid solution with polycrystalline Mo matrix along with the amorphous Mo-Al regions. To verify the reliability, all samples were exposed in a damp-heat (DH) chamber with 85°C and 85% relativity humidity for 168 hours. The electrical and optical properties of Mo-Al films after DH exposures were better than those of pure Mo films. According to the XPS analysis, it could be explained that the effect of Al dopant enhanced the reliability of Mo films by the passive oxide films of Al formed on the surface. In addition, the formations of MoSe manipulated by the content of Al were also demonstrated. |
| Starting Page | 002483 |
| Ending Page | 002487 |
| File Size | 1431471 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424458905 |
| ISSN | 01608371 |
| e-ISBN | 9781424458929 |
| DOI | 10.1109/PVSC.2010.5614732 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2010-06-20 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Films DH-HEMTs Solids Reliability Photovoltaic cells X-ray scattering Reflectivity |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering |
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