NDLI: Characterization of polycrystalline silicon films produced by aluminum-induced layer exchange for the various thicknesses of an aluminum oxide layer

Content Provider	IEEE Xplore Digital Library
Author	Jeong, H. Oh, K.H. Lee, J. Boo, S.
Copyright Year	2010
Description	Author affiliation: Korea Institute of Industrial Technology, 1110-9 Oryong Buk Gwangju, 500-480, Republic of Korea (Jeong, H.; Oh, K.H.; Lee, J.; Boo, S.)
Abstract	We characterized polycrystalline silicon films produced by aluminum-induced layer exchange (ALILE) for the various thicknesses of an aluminum oxide layer. The pc-Si film is fabricated by the ALILE process with a structure of glass/Al/Al/a-Si for application to a seed layer of polycrystalline silicon (pc-Si) solar cells using dc and RF sputtering, and PECVD methods, respectively. For investigation of the effects of oxide film thickness on the crystallinity in the ALILE process, the thickness of Al was varied from 4 to 50 nm including native oxidation in the ambient atmosphere. For characterization OM, SEM, Raman spectroscopy analyses are carried out. As results, the crystallinity was exponentially decayed with increase of Al thickness. Also, the grain size is decreased with increase of Al layer thickness. The maximum pc-Si grain size of about 60 µm is obtained at the relatively thin oxide layer. The preferential crystal orientation was (111) and more dominant for the thinner Al layers. In this work the effects of Al film thickness on the crystallization properties of a-Si by ALILE process are closely demonstrated such as grain size, preferential crystal orientation, and crystallinity.
Starting Page	002219
Ending Page	002221
File Size	896626
Page Count	3
File Format	PDF
ISBN	9781424458905
ISSN	01608371
e-ISBN	9781424458929
DOI	10.1109/PVSC.2010.5616058
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-06-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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