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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zhiyong Zhong Sugiyama, Y. Ishiwara, H. |
| Copyright Year | 2008 |
| Description | Author affiliation: Interdiscipl. Grad. Sch. of Sci. & Eng., Tokyo Inst. of Technol., Yokohama, Japan (Zhiyong Zhong; Ishiwara, H.) || Fujitsu Labs. Ltd., Atsugi, Japan (Sugiyama, Y.) |
| Abstract | $BiFe_{x}Cr_{1-x}O_{3}$ (x=0.4~0.6) thin films were formed on $Pt/Ti/SiO_{2}/Si$ (100) substrates by chemical solution deposition. The spin-coated, dried and calcined films were finally annealed in a mixed gas of $N_{2}$ and $O_{2}$ $(N_{2}:O_{2}=4:1)$ at 450, 500, 550 and 600°C. X-ray diffraction analysis revealed that polycrystalline grains of $BiFeO_{3}$ and $BiCrO_{3}$ coexist in the films, and that double perovskite $Bi_{2}FeCrO_{6}$ crystallites might also be included. The leakage current density measured at room temperature was lower than $1×10^{-5}$ $A/cm^{2}$ in the films annealed at 450°C. The remanent polarization increased with increase of the Fe ratio, and a large value of 45 $¿C/cm^{2}$ was obtained in the $BiFe_{0.6}Cr_{0.4}O_{3}$ thin film, when it was measured at 1.9 MV/cm and 50 kHz. Fatigue property was also improved and no degradation of the remanent polarization was observed in the $BiFe_{0.4}Cr_{0.6}O_{3}$ film by switching cycles up to 1 × $10^{8}.$ |
| Starting Page | 699 |
| Ending Page | 702 |
| File Size | 3101629 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424421855 |
| DOI | 10.1109/ICSICT.2008.4734627 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-10-20 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Ferroelectric materials Chromium Annealing Temperature measurement Polarization Semiconductor thin films Sputtering Substrates Chemicals X-ray diffraction fatigue ferroelectric FeRAM BiFeO |
| Content Type | Text |
| Resource Type | Article |
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