NDLI: Detection of stiction of suspending structures in MEMS by A Laser Doppler Vibrometer systems

Content Provider	IEEE Xplore Digital Library
Author	Jun-Wen Liu Qing-An Huang Jing Song Jie-Ying Tang
Copyright Year	2008
Description	Author affiliation: Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China (Jun-Wen Liu; Qing-An Huang; Jing Song; Jie-Ying Tang)
Abstract	Stiction as one of the most failures both in MEMS fabrication and operation has been widely studied. With the decrease in the dimension and material, the ubiquitous surface effect between the device and substrate has become more and more effective. Surface-micromachined structures formed by the wet etching of sacrificial layers are commonly plagued by problems of sticking to the substrate. This paper presents a useful diagnosis system for fully detecting and characterizing the stiction failure occurring in MEMS. The system consists of an LDV (laser Doppler vibrometer), a chamber with controllable environment such as pressure and temperature, and a diagnosis program developed by Matlab software. Full knowledge about the stiction, including its position, shape, stiction releasing configuration and probability of re-stiction can be accessed using the system. We also present an experimental way to analyze two important forces of the surface effect: the capillary force and the van der Waals force. The experimental diagnosis methodology and theoretical summary could provide a useful reference for detecting and predicting the stiction failure of micro-structures.
Starting Page	2472
Ending Page	2475
File Size	3669587
Page Count	4
File Format	PDF
ISBN	9781424421855
DOI	10.1109/ICSICT.2008.4735092
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-20
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Vibrometers Optical device fabrication Optical materials Wet etching Pressure control Optical control Temperature control Control systems Shape surface force Laser Doppler Vibrometer stiction
Content Type	Text
Resource Type	Article

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