NDLI: A bulk micromachined tunable dual-mode ku-band bandpass filter

Content Provider	IEEE Xplore Digital Library
Author	Min Miao Jingpeng Bu Yafei Wang Shufang Xu Liwei Zhao
Copyright Year	2008
Description	Author affiliation: Inst. of Inf. Microsyst., Beijing Inf. Sci. & Technol. Univ., Beijing, China (Min Miao; Yafei Wang; Shufang Xu; Liwei Zhao) \|\| Inst. of Electron., Chinese Acad. of Sci., China (Jingpeng Bu)
Abstract	This paper proposes a bulk micromachined tunable dual-mode bandpass filter. Splitting of odd and even degenerate modes in its resonators by perturbation, is utilized for bandpass filtering. Thus, the filter, with 4% bandwidth and 17 GHz midband, requires only half resonators of conventional micromachined devices, resulting in a more compact configuration. CPW (coplanar waveguide) and CPS (coplanar stripline) square-ring resonators and an open- circuited perturbation stub dominating passband are used. Actuation of two bulk micromachined switches placed symmetrically along resonator diagonal, may vary its electrical length, and shift both degenerate frequencies and tune filter mid-band frequency. Theoretical and finite-element fullwave tools are used to analyse the filter performance. A frequency shift of 0.6 GHz is seen, which is in good agreement with analytical solution of 0.58 GHz. Both original and tuned states present satisfying microwave performance, i.e. low passband insertion-loss (< 0.5 dB) and return-loss (<-15 dB) and high stopband rejection (>30 dB). The bulk micromachining is simpler than conventional ones for microswitches. Among the advantages, little mismatch between the micro bridges and the Pyrex glass substrate is demonstrated, and thus reliability at elevated temperature is greatly improved. Tested results of fabricated switch samples shows that the device may be a good candidate for novel Ku-band inter-scientific satellite, and handheld wireless gadgets.
Starting Page	2480
Ending Page	2483
File Size	4056165
Page Count	4
File Format	PDF
ISBN	9781424421855
DOI	10.1109/ICSICT.2008.4735094
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-20
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Band pass filters Resonator filters Switches Frequency Tunable circuits and devices Coplanar waveguides Passband Microwave filters Filtering Bandwidth bulk micromachining RF MEMS Tunable filter Dual mode
Content Type	Text
Resource Type	Article

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