NDLI: Study on the quadrature error under Varying ambient pressure for a bulk micromachined Z-axis gyroscope

Content Provider	IEEE Xplore Digital Library
Author	Jian Cui Longtao Lin Zhongyang Guo Xiaozhu Chi Qiancheng Zhao Zhenchuan Yang Guizhen Yan
Copyright Year	2008
Description	Author affiliation: Inst. of Microelectron., Peking Univ., Beijing, China (Jian Cui; Longtao Lin; Zhongyang Guo; Xiaozhu Chi; Qiancheng Zhao; Zhenchuan Yang; Guizhen Yan)
Abstract	This paper focused on the study of the quadrature error for a bulk micromachined gyroscope under varying pressure conditions between 150 Pa and 100 kPa. The source of the quadrature error and the non-ideal model of the micromachined gyroscope are presented with details. The change trend and characterization of pressure dependence were analyzed both analytically and experimentally in the custom-built installation. The results indicated that in order to meet high resolution and stabilization of the quadrature error, the optimal working pressure applied to the gyroscope must limit to a certain boundary condition. At last, some effective methods of restraining the quadrature error were put forward.
Starting Page	2440
Ending Page	2443
File Size	1962750
Page Count	4
File Format	PDF
ISBN	9781424421855
DOI	10.1109/ICSICT.2008.4735065
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-20
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gyroscopes Crosstalk 1f noise Q factor Fabrication Force sensors Coupling circuits Springs Microelectronics Laboratories vacuum sealed micromachined gyroscope quadrature error pressure
Content Type	Text
Resource Type	Article

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