NDLI: Simulation and fabrication of the SiC-based clamped-clamped filter

Content Provider	IEEE Xplore Digital Library
Author	Yongmei Zhao Jin Ning Guosheng Sun Xingfang Liu Liang Wang Gang Ji Lei Wang Wanshun Zhao Jinmin Li Fuhua Yang
Copyright Year	2008
Description	Author affiliation: Key Lab. of Semicond. Mater. Sci., Chinese Acad. of Sci., Beijing, China (Gang Ji; Lei Wang; Wanshun Zhao; Jinmin Li) \|\| State Key Labs. of Transducer Technol., Chinese Acad. of Sci., Beijing, China (Yongmei Zhao; Jin Ning; Guosheng Sun; Xingfang Liu; Liang Wang; Fuhua Yang)
Abstract	In this paper, the SiC-based clamped-clamped filter was designed and fabricated. The filter was composed of two clamped-clamped beam micromechanical resonators coupled by a spring coupling beam. Structural geometries, including the length and width of the resonator beam and coupling beam, were optimized by simulation for high frequency and high Q, under the material properties of SiC. The vibrating modes for the designed filter structure were analyzed by finite element analysis (FEA) method. For the optimized structure, the geometries of resonator beams and coupling beams, as well as the coupling position, the SiC-based clamped-clamped filter was fabricated by surface micromaching technology.
Starting Page	2532
Ending Page	2535
File Size	5071758
Page Count	4
File Format	PDF
ISBN	9781424421855
DOI	10.1109/ICSICT.2008.4735088
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-20
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Resonator filters Optical coupling Geometry Micromechanical devices Springs Solid modeling Frequency Material properties Silicon carbide
Content Type	Text
Resource Type	Article

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