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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yang, C.-F. Chen, C.-L. Busnaina, A. Dokmeci, M.R. |
| Copyright Year | 2009 |
| Description | Author affiliation: Mechanical and Industrial Eegineering Department, NSF Center for High-rate Nanomanufacturing, Northeastern University, Boston, MA 02115 USA (Busnaina, A.) || Electrical and Computer Eegineering Department, NSF Center for High-rate Nanomanufacturing, Northeastern University, Boston, MA 02115 USA (Yang, C.-F.; Chen, C.-L.; Dokmeci, M.R.) |
| Abstract | In this paper, we present a suspended Single-Walled Carbon Nanotube (SWNT) based pH sensor utilizing a low temperature Dielectrophoretic (DEP) assembly process on a flexible parylene-C substrate. Parylene-C, a light weight, flexible and inert material, is compatible with many microfabrication processes. Furthermore, utilizing parylene-C as a flexible substrate, one can readily create a suspended microplatform utilizing an O2 plasma etch process. Suspended nanobridges have larger exposed surface areas and may potentially have enhanced sensitivity for sensing applications. Fabricating these structures on a thin (10μm) parylene-C substrate allows their utilization as flexible devices or in wearable sensor applications. We have successfully assembled suspended SWNT nanobridges across a spacing of 4μm. The electrical characterization results from the assembled SWNTs yield ohmic behavior with a measured two-terminal resistance of ~17KΩ. Furthermore, the conductometric measurements of the SWNT sensors have demonstrated that corresponding to an increase in pH value, the resistance of SWNTs has decreased due to the $OH^{-}$ group that attached on to the wall of the SWNTs and changed the electrical properties of the SWNTs. These novel suspended nanostructures can be used as potential candidates in nanosensor applications. |
| Starting Page | 4102 |
| Ending Page | 4105 |
| File Size | 1059486 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424432967 |
| ISSN | 1557170X |
| DOI | 10.1109/IEMBS.2009.5334598 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-09-03 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Carbon nanotubes Assembly Temperature sensors Plasma temperature Wearable sensors Electrical resistance measurement Electric variables measurement Electric resistance Dielectrophoresis Plasma applications |
| Content Type | Text |
| Resource Type | Article |
| Subject | Signal Processing Biomedical Engineering Health Informatics Computer Vision and Pattern Recognition |
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