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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Selvarasah, S. Makaram, P. Chia-Ling Chen Xugang Xiong Shih-Hsien Chao Busnaina, A. Sridhar, S. Dokmeci, M.R. |
| Copyright Year | 2007 |
| Description | Author affiliation: ECE Dept., Northeastern Univ., Boston, MA (Selvarasah, S.) |
| Abstract | We present the first design, fabrication and testing results from a three dimensional multi-walled carbon nanotube based thermal sensor fabricated on a flexible parylene-C substrate. Parylene-C is an inert, biocompatible, optically transparent, room temperature deposited polymer with a high mechanical strength, yet is rarely used as a flexible substrate. By utilizing a 2 mask process, we have manufactured a versatile microplatform for nanoscale assembly and then by utilizing dielectrophoretic assembly, incorporate MWNTs onto the platform in a 3D manner. The MWNTs are next encapsulated using a thin Parylene-C layer that acts as an environmental barrier and in addition keeps the MWNTs intact. The temperature Coefficient of Resistance of the MWNT sensor is measured to be between -0.21% and -0.66% per degree. The thermal sensor is compact, is very high density and could potentially be used for diverse temperature sensing applications such as in wearable textiles, on non planar surfaces and for in-vivo applications. |
| Starting Page | 1062 |
| Ending Page | 1066 |
| File Size | 608698 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424406074 |
| DOI | 10.1109/NANO.2007.4601366 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-08-02 |
| Publisher Place | Hong Kong |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Substrates Assembly Temperature measurement Three dimensional displays Thermal sensors Dielectrophoresis Electrodes Flexible parylene substrates Three Dimensional nanoassembly MWNT thermal sensor |
| Content Type | Text |
| Resource Type | Article |
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