NDLI: Parylene-based encapsulated fluid MEMS sensors

Content Provider	IEEE Xplore Digital Library
Author	Meng, E. Gutierrez, C.
Copyright Year	2009
Description	Author affiliation: Department of Biomedical Engineering, Viterbi School of Engineering, University of Southern California, Los Angeles, CA 90089-1111 USA (Gutierrez, C.) \|\| Departments of Biomedical and Electrical Engineering, Viterbi School of Engineering, University of Southern California, Los Angeles, CA 90089-1111 USA (Meng, E.)
Abstract	A new class of transducers based on a Parylene C encapsulated fluid element are introduced. These versatile units have thus far been explored as impedance-based contact sensors and electrolysis-based actuators for fine positioning of neural recording electrodes. These sensors may be fabricated on thin, flexible substrates which permits application on non-planar or three dimensional surfaces. Another interesting modality is the coupling of individual mechanically-responsive, impedance-based sensing elements distributed over a surface but interconnected through microfluidic channel networks in a manner that emulates mechanotransduction in natural biological systems. These fluidic elements offer interesting new possibilities in neural prosthetics.
Starting Page	1039
Ending Page	1041
File Size	640827
Page Count	3
File Format	PDF
ISBN	9781424432967
ISSN	1557170X
DOI	10.1109/IEMBS.2009.5334826
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Electrodes Valves Electromechanical sensors Chemical elements Biomedical engineering Surface impedance Sensor arrays Actuators Encapsulation
Content Type	Text
Resource Type	Article
Subject	Signal Processing Biomedical Engineering Health Informatics Computer Vision and Pattern Recognition

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Biocompatible MEMS Electrode Array for Determination of Three-Dimensional Strain

A Parylene-Silicon Cochlear Electrode Array with Integrated Position Sensors

Method to quantify the effect of passivation layer in bio-impedance sensors

Improved chronic neural stimulation using high surface area platinum electrodes

Parylene-C Embedded CNT-Based MEMS Piezoresistive Pressure Sensors Using DEP Nanoassembly

An implantable all-Parylene liquid-impedance based MEMS force sensor

Impedance-Based Force Transduction Within Fluid-Filled Parylene Microstructures

Measurement of noise and impedance of dry and wet textile electrodes, and textile electrodes with hydrogel

Impedance pneumography using textile electrodes

Parylene-based encapsulated fluid MEMS sensors

Similar Documents

Biocompatible MEMS Electrode Array for Determination of Three-Dimensional Strain

A Parylene-Silicon Cochlear Electrode Array with Integrated Position Sensors

Method to quantify the effect of passivation layer in bio-impedance sensors

Improved chronic neural stimulation using high surface area platinum electrodes

Parylene-C Embedded CNT-Based MEMS Piezoresistive Pressure Sensors Using DEP Nanoassembly

An implantable all-Parylene liquid-impedance based MEMS force sensor

Impedance-Based Force Transduction Within Fluid-Filled Parylene Microstructures

Measurement of noise and impedance of dry and wet textile electrodes, and textile electrodes with hydrogel

Impedance pneumography using textile electrodes

Parylene-based encapsulated fluid MEMS sensors