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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Pourkamali, S. Abdolvand, R. Ho, G.K. Ayazi, F. |
| Copyright Year | 2004 |
| Description | Author affiliation: Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA (Pourkamali, S.; Abdolvand, R.; Ho, G.K.; Ayazi, F.) |
| Abstract | This paper presents a new electrical coupling technique for implementation of high-order narrow-bandwidth programmable bandpass filters using micromechanical resonators. The concept of electrostatic coupling of closely-spaced microresonators for filter synthesis is introduced and its electromechanical modeling is presented. The electrostatic coupling approach eliminates the need for any physical coupling element in between the resonators and provides the highest degree of tunability and design flexibility among the available filter synthesis approaches. Low frequency single crystal silicon prototypes of second order electrostatically coupled filters have been successfully implemented and characterized. Filter quality factors as high as 6,800 (0.015%BW) with more than one decade of bandwidth tunability are demonstrated in a second order electrostatically coupled beam filter with a center frequency of 170 kHz. |
| Sponsorship | IEEE Robotics and Automation Soc |
| Starting Page | 584 |
| Ending Page | 587 |
| File Size | 299829 |
| Page Count | 4 |
| File Format | |
| ISBN | 078038265X |
| DOI | 10.1109/MEMS.2004.1290652 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2004-01-25 |
| Publisher Place | Netherlands |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical coupling Micromechanical devices Resonator filters Band pass filters Electrostatics Frequency Microcavities Silicon Prototypes Q factor |
| Content Type | Text |
| Resource Type | Article |
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