NDLI: Applying Technique of Sacrificial Layer for the Fabrication of Microfilter

Content Provider	IEEE Xplore Digital Library
Author	Yaw-Jen Chang Tat Yan Chan Jia-Hao Wang
Copyright Year	2010
Abstract	Biochip plays an important role in biotechnology and many scientists also pay a lot of attention on this product. Thus, in this study we used MEMS and sacrificial layer techniques to manufacture the microfilter. It only depends on different development properties of the positive and negative photoresists. The feature size of filtration can be precisely controlled by the thickness of sacrificial layer. The main materials for this study are just photoresists, such as negative photoresist SU-8 and positive photoresists AZ4620 and RP4000. The fabrication process was carried out in the yellow room. Compared with the traditional micromachining methods such as bulk micromanufacturing, surface micromachining and the LIGA process, this proposed design and fabrication of microfilter have many advantages including economical fabrication cost and high yield.
Starting Page	1
Ending Page	3
File Size	252438
Page Count	3
File Format	PDF
ISBN	9781424447121
ISSN	21517622
DOI	10.1109/ICBBE.2010.5517146
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-06-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Micromechanical devices Microfiltration Biotechnology Filtration Resists Micromachining Manufacturing Size control Thickness control
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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