NDLI: Selective removal of TCO stack layers for CdTe P1 process with a tailored pulse laser

Content Provider	IEEE Xplore Digital Library
Author	Rekow, M. Murison, R. Dinkel, C. Panarello, T. Nikumb, S. Sampath, W.S.
Copyright Year	2011
Description	Author affiliation: ESI-PyroPhotonics Lasers, Inc. 275 Rue Kesmark, Dollard-des-Ormeaux, Québec H9B 3J1, Canada (Rekow, M.; Murison, R.; Panarello, T.) \|\| NRC Canada, Industrial Materials Institute-CAMM, 800 Collip Circle, London, Ontario NG6 4X8 Canada (Dinkel, C.; Nikumb, S.) \|\| NSF I/UCRC for Next Generation Photovoltaics, Colorado State University, Fort Collins, CO, USA (Sampath, W.S.)
Abstract	Laser scribing has been used with great success for the CdTe P1 scribe step and a standard process sequence is well established in the industry. In particular, the common methodology for the P1 step results in exposure of the soda lime glass substrate. In turn, the Na diffusion from the glass into the film is detrimental to the performance of the CdTe solar cell (1). To mitigate this problem, commercial processes perform the P1 scribe after the CdTe deposition and the resulting groove is then backfilled with a photoresist. This photo-resist application process accounts for a significant fraction of the cost for the capital equipment in a CdTe module production line. In this paper we study the impact of wavelength, pulse duration, temporal pulse shape, and film orientation on the removal dynamics of the SnO film stack on TEC10 glass. We utilize a unique pulse-programmable fiber laser with the aim of developing a process that removes only SnO:F conductive layer from the TCO stack, leaving the underlying barrier layers intact. Achieving this result would allow the P1 scribe to be performed before the CdTe deposition and perhaps even at the time of glass manufacture thereby completely eliminating the need for the photo-resist step. We utilize optical microscopy, white light profilometry, and resistance measurements to characterize the resulting process.
Starting Page	002813
Ending Page	002819
File Size	14152053
Page Count	7
File Format	PDF
ISBN	9781424499663
ISSN	01608371
e-ISBN	9781424499656
DOI	10.1109/PVSC.2011.6186530
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-19
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Glass Films Substrates Laser ablation Shape
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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CdTe/CdS core-shell nanowire structures on glass substrates for photovoltaic applications — Growth and characterization

Polycrystalline CdTe solar cells on buffered commercial TCO-coated glass with efficiencies above 15%

Production ramping of abound solar's CdTe thin film manufacturing process

High throughput processing of CdTe/CdS solar cells with thin absorber layers

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Properties of poly silicon films deposited on silicon seed-layers prepared by AIC process

Optimized scribing of TCO layers on glass by selective femtosecond laser ablation

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Selective removal of TCO stack layers for CdTe P1 process with a tailored pulse laser

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