NDLI: Density profiles in sputtered molybdenum thin films and their effects on sodium diffusion in Cu(In photovoltaics

Content Provider	IEEE Xplore Digital Library
Author	Jian Li Glynn, S. Mansfield, L. Young, M. Yan, Y. Contreras, M. Noufi, R. Terry, F.L. Levi, D.
Copyright Year	2011
Description	Author affiliation: Department of Electrical Engineering & Computer Science, University of Michigan, Ann Arbor, MI 48109, USA (Terry, F.L.) \|\| National Renewable Energy Laboratory, Golden, CO 80401, USA (Jian Li; Glynn, S.; Mansfield, L.; Young, M.; Yan, Y.; Contreras, M.; Noufi, R.; Levi, D.)
Abstract	Molybdenum (Mo) thin films were sputtered onto soda lime glass (SLG) substrates. The main variable in the deposition parameters, the argon (Ar) pressure p, was varied in the range of 6–20 mTorr. Ex situ spectroscopic ellipsometry (SE) was performed to find out that the dielectric functions ε of the Mo films were strongly dependent on p, indicating a consistent and significant decrease in the Mo film density ρ with increasing p. This trend was confirmed by high-angle-annular-dark-field scanning transmission electron microscopy. ε of Mo was then found to be correlated with secondary ion mass spectroscopy profiles of Sodium (Na) in the Cu(In (CIGS) layer grown on top of Mo/SLG. Therefore, in situ optical diagnostics can be applied for process monitoring and optimization in the deposition of Mo for CIGS solar cells. Such capability is demonstrated with simulated optical transmission and reflectance of variously polarized incident light, using ε deduced from SE.
Starting Page	002749
Ending Page	002752
File Size	2180540
Page Count	4
File Format	PDF
ISBN	9781424499663
ISSN	01608371
e-ISBN	9781424499656
DOI	10.1109/PVSC.2011.6186516
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-19
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical films Optical reflection Substrates Optical imaging Optical sensors Optical polarization
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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