NDLI: Tuning of tungsten thin film superconducting transition temperature for fabrication of photon number resolving detectors

Content Provider	IEEE Xplore Digital Library
Author	Lita, A.E. Rosenberg, D. Nam, S. Miller, A.J. Balzar, D. Kaatz, L.M. Schwall, R.E.
Copyright Year	2002
Abstract	Tungsten thin films can form in one of two crystal structures: alpha (bcc), with a superconducting transition temperature (T/sub c/) of 15 mK, and beta (A15), with a T/sub c/ between 1 and 4 K. Films with intermediate T/sub c/s are composed of both alpha and beta phases. We have investigated how to tune the film T/sub c/ in order to obtain certain values (T/sub c/ /spl sim/ 100 mK) suitable for the fabrication of photon number resolving transition-edge sensor (TES) and arrays of TES detectors for astronomical and quantum information applications. Variation of deposition conditions, and also the choice of the underlayer/coating for equal deposition conditions, affect the T/sub c/s of tungsten films. We have used x-ray diffraction to determine the structure of tungsten thin films and film stress. The results indicates that the film stress state depends on the underlying substrate and coating. To understand the variation of T/sub c/ values and to allow precise tuning of these values, we have investigated substrates and coatings for tungsten film multilayer stacks and determined tungsten film stress by x-ray diffraction at both room temperature and 8 K.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	3528
Ending Page	3531
Page Count	4
File Size	162191
File Format	PDF
ISSN	10518223
Volume Number	15
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Tungsten Superconducting thin films Superconducting transition temperature Fabrication Sensor arrays Coatings Stress Tuning Detectors X-ray diffraction x-ray measurements Materials processing stress superconducting films
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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