NDLI: New fabrication process for superconducting quantum interference devices with Nb/AlAlOx/Nb junctions by using photosensitive polyimide insulation layers

Content Provider	IEEE Xplore Digital Library
Author	Kawai, J. Shimozu, T. Kikuchi, K. Kawabata, M. Nakagawa, H. Aoyagi, M. Uehara, G.
Copyright Year	2002
Abstract	We propose a new fabrication process for Superconducting Quantum Interference Devices (SQUIDs) with Nb/Al/AlOx/Nb junctions by using photosensitive polyimide insulation layers. The photosensitive polyimide, which is synthesized by multi-block copolymerization, can be formed into a thin layer with spin-coating, and patterned with conventional photolithography. Compared to forming a SiO/sub 2/ insulation layer with a sputtering and etching process, the fabrication is simplified and the coverage over the edge of the patterns can be improved due to planarization. SQUIDs with a flux transformer having two insulation layers were successfully fabricated with this process and were characterized. The critical current of the flux transformer was more than 20 mA, and a flux noise of less than 1/spl times/10/sup -6/ /spl Phi//sub 0///spl radic/Hz was obtained in the white region. With an axial gradiometer in combination with this SQUID, a field resolution of 1.5 fT//spl radic/Hz was achieved.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	825
Ending Page	828
Page Count	4
File Size	1014840
File Format	PDF
ISSN	10518223
Volume Number	15
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Niobium Fabrication Superconducting devices Superconducting epitaxial layers Josephson junctions SQUIDs Interference Polyimides Power transformer insulation Lithography SQUID Insulator photosensitive polyimide planarization
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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