NDLI: Fabrication of Thick Metal Absorber With Overhanging Structure for TESs

Content Provider	IEEE Xplore Digital Library
Author	Young Hwa Lee Jai Beom Bae Il Hwan Kim Yong-Hamb Kim Hwa Yong Lee Kyoung Beom Lee Min Kyu Lee Sang Jun Lee
Copyright Year	2002
Abstract	In this report, we describe progress in fabricating thick metal absorbers with an overhanging structure for TES applications. First, a negative photoresist is photo-lithographed in order to define the stem of the mushroom structure. A thin seed layer of Au is sputtered over the photoresist pattern to provide an electrical contact for electroplating. Another layer of the photoresist is coated and patterned to form the cap of the structure. A thick layer of Au is then electro-deposited on the open part of the seed layer. Finally, the overhanging structure is completed after chemically releasing the photoresist and the unwanted seed layer. This absorber made on a Ti/Au bilayer whose sensitivity parameter alpha is about 350, is currently being developed to measure X-rays with high filling factor and high detection efficiency.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	469
Ending Page	472
Page Count	4
File Size	617287
File Format	PDF
ISSN	10518223
Volume Number	19
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Gold Superconducting films Superconducting transition temperature Biomembranes Resists X-ray detectors X-ray detection Superconducting materials Temperature sensors X-ray detector Au absorber superconducting transition edge sensor (TES)
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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