NDLI: Examination of relationship between resistivity and photocurrent induced magnetic field in silicon wafers using laser SQUID

Content Provider	IEEE Xplore Digital Library
Author	Daibo, M. Kamiwano, D.
Copyright Year	2002
Abstract	Using the laser SQUID method, we examined the relationship between silicon wafer resistivity and magnetic field. By irradiating the wafer with a 3.2 W high-power laser beam, we were able to generate a measurable magnetic field perpendicular to the wafer, even for the wafers without p-n junctions. For samples having resistivities of 130 /spl Omega//spl middot/cm or less, we observed magnetic field distributions in the form of concentric circles. Histogram analysis showed that as resistivity decreases, mean value of magnetic field and standard deviation increase. For p-type wafers having resistivities of up to 300 /spl Omega//spl middot/cm, both mean value of magnetic field and standard deviation vary as a power law with respect to resistivity. However, for samples having resistivities of 300 /spl Omega//spl middot/cm or higher, the relationship was saturated, and determining resistivity was difficult. Since the laser SQUID method can be used to measure resistivity without electrical contact, it works well even for wafers with surface oxide films, and does not cause contamination.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	684
Ending Page	687
Page Count	4
File Size	451834
File Format	PDF
ISSN	10518223
Volume Number	15
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Conductivity Photoconductivity Magnetic fields Silicon SQUIDs Magnetic field measurement Pollution measurement Laser beams P-n junctions Histograms SQUID Laser resistivity semiconductor
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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