NDLI: Fabrication of epitaxial NbN devices with TiN resistors

Content Provider	IEEE Xplore Digital Library
Author	Kawakami, A. Terajima, R. Imai, S. Zhen Wang
Copyright Year	2002
Abstract	To extend the application range of epitaxial NbN devices, we developed epitaxial TiN thin-film resistors. TiN has approximately the same lattice constant and crystalline structure as NbN and MgO. However, high quality TiN thin films show superconductivity at the liquid helium temperature. We attempted to remove this superconductivity using TiO impurity. The ratio of Ar and N/sub 2/ was fixed at 5:1 and the O/sub 2/ flow ratio varied from 0 to 1.6% in relation to the total gas flow. When O/sub 2/ ranged from 0.5 to 1.6%, superconductivity vanished and the resistivity obtained was about 50-145 /spl mu//spl Omega/cm at 4.2 K. X-ray analysis showed that the TiN films grew epitaxially on the MgO substrate as did the NbN films on the TiN films. Using the TiN resistor, a fully epitaxial NbN Josephson array oscillator was fabricated and tested. The oscillator was formed with 10 TiN-shunted NbN/MgO/NbN tunnel junctions and NbN microstrip resonators. At around 1.0THz, Shapiro steps induced by the Josephson oscillation were observed in the detector I-V characteristics.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	984
Ending Page	987
Page Count	4
File Size	489557
File Format	PDF
ISSN	10518223
Volume Number	15
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Tin Resistors Superconductivity Superconducting films Superconducting thin films Oscillators Thin film devices Lattices Crystallization titanium oxide Epitaxial niobium nitride resistor titanium nitride
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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