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Content Provider | IEEE Xplore Digital Library |
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Author | Pervez, S.A. Heesang Kim Byung-Gook Park Hyungcheol Shin |
Copyright Year | 2009 |
Description | Author affiliation: School of Electrical Engineering, Seoul National University Seoul 151-742, Republic of Korea (Pervez, S.A.; Heesang Kim; Byung-Gook Park; Hyungcheol Shin) |
Abstract | Saddle MOSFET (S-MOSFET), a device with a recess channel having tri-gate controllability over the channel, shows improved characteristics in controlling short channel effects and higher drive current compared with conventional recessed channel devices [1]. On the other hand, tri-gated structure has some disadvantages caused by corner effect, which can result in unstable threshold voltage (V) characteristics by early turn-on. This premature corner inversion leads to several problems like lower V, larger leakage current and the I ratio degradation, consequently [2,3]. In this work, we have examined the reasons for the abnormal corner effect, its impact on the device characteristics, and possible approaches to suppress it. The corner effect in S-MOSFET resembles that of bulk FINFET [4] and thus should be dealt accordingly. Simulations have been performed on Sentaurus, a drift-diffusion based 3-D device simulator [5]. Device is designed using Sentaurus Process Emulator. Hurkx [6] band-to-band tunneling model is combined with Shockley-Read-Hall recombination to simulate realistic values of OFF-state leakage current. |
Starting Page | 1 |
Ending Page | 2 |
File Size | 203106 |
Page Count | 2 |
File Format | |
ISBN | 9781424460304 |
DOI | 10.1109/ISDRS.2009.5378226 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2009-12-09 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | MOSFET circuits Random access memory Leakage current Electrons Doping Educational institutions Controllability Threshold voltage Degradation FinFETs |
Content Type | Text |
Resource Type | Article |
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