NDLI: Electrical characterisation of magnesium and tellurium implanted indium gallium arsenide

Content Provider	IEEE Xplore Digital Library
Author	Gwilliam, R.M. Anjum, M. Sealy, B.J. Mynard, J.E. Chereckdjian, S.
Copyright Year	1996
Description	Author affiliation: Dept. of Electron. & Electr. Eng., Surrey Univ., Guildford, UK (Gwilliam, R.M.)
Abstract	There has been a great deal of interest in the Indium Gallium Arsenide (InGaAs) material system, both lattice matched to Indium Phosphide (InP) as well as material grown pseudomorphically on GaAs because of its importance to optoelectronic devices. In this paper we present some preliminary observations on the electrical properties of In/sub x/Ga/sub 1-x/As on Gallium Arsenide (GaAs) substrate implanted with magnesium with x varying between 0 to 60 atomic %. Our results indicate that p-type activity is difficult to realise in In/sub x/Ga/sub 1-x/As for x>50%. We also report results of tellurium doubly charged implanted into In/sub 0.53/Ga/sub 0.47/As lattice matched to InP. About 600 angstroms of rf sputtered Aluminium Nitride (AlN) encapsulant was used to carry out 30s isochronal anneals in an optical furnace at temperatures of 600, 700 and 800/spl deg/C. Differential Hall effect measurements were performed to provide dopant depth profiles. Good dopant activation and mobilities were obtained.
Starting Page	702
Ending Page	704
File Size	268541
Page Count	3
File Format	PDF
ISBN	078033289X
DOI	10.1109/IIT.1996.586513
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-06-16
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnesium Tellurium Indium phosphide Gallium arsenide Indium gallium arsenide Lattices Optoelectronic devices Aluminum Annealing Furnaces
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in