NDLI: Enhanced utilization of SDS cylinder gases on the Eaton NV 8200P ion implanter

Content Provider	IEEE Xplore Digital Library
Author	Brubaker, S.R. Spears, J.M. Arrale, A.M.
Copyright Year	1996
Description	Author affiliation: Semicond. Equipment Oper., Eaton Corp., Austin, TX, USA (Brubaker, S.R.)
Abstract	Safe delivery system (SDS) cylinders used in medium current ion implant applications deliver gas at flow rates of 0.2 to 2 sccm at cylinder pressures from 760 Torr to substantially below 50 Torr. Flow measurement and control using thermal methods has limitations in low flow, low inlet pressure applications that limit the amount of gas that can be extracted from an SDS cylinder. A flow control method using a capacitance manometer has been implemented on an Eaton NV-8200P ion implanter to increase the cylinder lifetime of a SDS gas cylinder. This paper presents flow data as a function of inlet pressure for several thermal mass flow controllers in a low flow/low inlet pressure application and shows the relative advantages of using a capacitance manometer flow measurement and control device to regulate the flow of gas to the source.
Starting Page	482
Ending Page	485
File Size	314166
Page Count	4
File Format	PDF
ISBN	078033289X
DOI	10.1109/IIT.1996.586405
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-06-16
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gases Pressure control Weight control Safety Implants Pressure measurement Solids Fluid flow measurement Capacitance Hazards
Content Type	Text
Resource Type	Article

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