NDLI: Process performance of SDS, high pressure hydrides and solid vaporizer feed materials on a 9500/spl times/R ion implanter

Content Provider	IEEE Xplore Digital Library
Author	Marin, T. Boyd Jr., W.G. Mcanus, J.
Copyright Year	1996
Description	Author affiliation: Appl. Materials, Austin, TX, USA (Marin, T.)
Abstract	Key process performance characteristics of pure As and P hydrides (AsH/sub 3/ and PH/sub 3/) from low-pressure, zeolite-packed bottles, known as safe delivery sources (SDS), were investigated on a 9500/spl times/R ion implanter. The performance of the SDS source materials was compared to results using hydrides from conventional high-pressure, diluted bottles (HP) and solid vaporizers. The key characteristics tested were; Maximum Beam Currents, Dose Calibration, Depth Profiles, Mass Spectra and Beam Tuning Times. Health and safety issues were extensively investigated throughout the design and implementation of the SDS gas handling system. The SDS source materials were found to be superior to the HP sources for beam current and transfer ratios at all energies. SDS feed materials were superior to solid sources in tuning times (less than 300 sec for all switching combinations) beamline cleanliness and low-energy beam currents.
Starting Page	307
Ending Page	310
File Size	384942
Page Count	4
File Format	PDF
ISBN	078033289X
DOI	10.1109/IIT.1996.586270
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-06-16
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Solids Feeds Gases Hydrogen Safety Fluid flow Marine technology Ash Testing Calibration
Content Type	Text
Resource Type	Article

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