NDLI: In package micro-aligner for fiber-optic packaging

Content Provider	IEEE Xplore Digital Library
Author	Haake, J.M. Beranek, M.W.
Copyright Year	1998
Description	Author affiliation: Boeing Co., St. Louis, MO, USA (Haake, J.M.)
Abstract	We describe and demonstrate a 3-axis MEMS active fiber-optic micro-aligner, which will enable in-package alignment of fiber-optic and micro-optic components. The micro-aligner is a wafer level fabricated device, based on an integration of silicon micromachining and LIGA technology. The electrically controllable actuators demonstrate the high force and displacement necessary to overcome fiber-optic bending stiffness, counterforce springs, friction, and wirebonds, to perform active alignment of an optical fiber inside an optoelectronic package housing. We have demonstrated movement of >30 microns in all three axes in an in-package configuration. The first prototype devices are currently small enough (4/spl times/4/spl times/0.5 mm/sup 3/) to fit into a standard optoelectronic package. In the future we expect that micro-aligner devices with the same forces and displacements can be made smaller than 1/spl times/1/spl times/0.5 mm/sup 3/ thus allowing for multiple singlemode fiber-optic attachments inside standard optoelectronic package housings.
Starting Page	1446
Ending Page	1449
File Size	800607
Page Count	4
File Format	PDF
ISBN	0780345266
ISSN	05695503
DOI	10.1109/ECTC.1998.678934
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-05-25
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Packaging Optical fiber devices Wafer scale integration Micromechanical devices Silicon Micromachining Displacement control Force control Optical control Actuators
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in