NDLI: Development of aluminum nitride-based acoustic wave sensors

Content Provider	IEEE Xplore Digital Library
Author	Jianzeng Xu Hao Ying Auner, G.
Copyright Year	2002
Description	Author affiliation: Dept. of Electr. & Comput. Eng., Wayne State Univ., Detroit, MI, USA (Jianzeng Xu; Hao Ying; Auner, G.)
Abstract	One of the most important applications of acoustic wave sensor systems is to detect chemical or biological agents because of their great potential for realtime and highly sensitive detection at low cost. We report preliminary experimental results on developing novel acoustic wave sensors for biomedical applications using aluminum nitride (AlN) thin films. Compared to conventional piezoelectric materials such as quartz, AlN is advantageous in terms of higher acoustic velocity, higher electromechanical coupling coefficient, and higher stability in harsh environment, translating to better sensor performance. We have designed, prototyped, and tested an AlN-based. sensor. The center frequency is measured 174 MHz for its surface acoustic wave mode and 206 MHz for its surface transverse wave mode. The phase velocities are 5569 m/s and 6608 m/s, respectively. As expected, the frequency response of the surface transverse wave mode changed little when under water load. Immobilization was investigated using chemical compounds or magnetic microbeads. The result showed good affinity to AlN film. Finally, we found an almost linear relationship between the resonant frequency of the sensor and temperature, with the temperature coefficient being about 90 PPM//spl deg/C.
Starting Page	1716
Ending Page	1717
File Size	125457
Page Count	2
File Format	PDF
ISBN	0780376129
ISSN	1094687X
DOI	10.1109/IEMBS.2002.1106617
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-10-23
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Aluminum Acoustic waves Acoustic sensors Biosensors Chemical and biological sensors Electromechanical sensors Surface acoustic waves Temperature sensors Acoustic signal detection Thin film sensors
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Biosensors based on flexural mode piezo-diaphragm

SAW chemical sensors based on AlGaN/GaN piezoelectric material system: acoustic design and packaging considerations

Detection of Ammonia Using Shear Horizontal Surface Acoustic Wave Resonators

Acoustic wave biosensors

P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device

A Nitrogen Dioxide Surface Acoustic Wave Sensor Based on Polyaniline/Tungsten Oxide Nanocomposite

Temperature coefficients of SAW velocity for AlN thin film sputtered on ST-X quartz

Vapor phase SAW immunoassay sensors

Development of aluminum nitride-based acoustic wave sensors

Similar Documents

Biosensors based on flexural mode piezo-diaphragm

SAW chemical sensors based on AlGaN/GaN piezoelectric material system: acoustic design and packaging considerations

Detection of Ammonia Using Shear Horizontal Surface Acoustic Wave Resonators

Acoustic wave biosensors

P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device

A Nitrogen Dioxide Surface Acoustic Wave Sensor Based on Polyaniline/Tungsten Oxide Nanocomposite

Temperature coefficients of SAW velocity for AlN thin film sputtered on ST-X quartz

Vapor phase SAW immunoassay sensors

Development of aluminum nitride-based acoustic wave sensors