Please wait, while we are loading the content...
| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jiantao Zheng Modi, M. Ginga, N. Sitaraman, S. |
| Copyright Year | 2007 |
| Description | Author affiliation: Georgia Inst. of Technol, Atlanta (Jiantao Zheng; Modi, M.; Ginga, N.; Sitaraman, S.) |
| Abstract | Thin film layers are utilized in emerging microelectronics, optoelectronics, and MEMS devices. Typically these thin film layers are composed of different materials with dissimilar properties. A common mode of failure for thin films is delamination caused by external loading or intrinsic stress present in the materials. To characterize bonded thin film material systems, it is necessary to measure the interfacial fracture toughness. When material thicknesses approach micro and nano scales, interfacial fracture toughness measurement is a challenging task. Accordingly, innovative test techniques need to be developed to study interfacial fracture parameters. The ongoing research at Georgia Institute of Technology is developing fixtureless delamination test techniques that can be used to measure interfacial properties of nano-and micro-scale thin films. The modified decohesion test (MDT) and the single-strip decohesion test (SSDT) are such fixtureless tests under development. In these tests a thin film interface material of interest is deposited on a substrate and delamination is driven by a superlayer material with high intrinsic stress sputter-deposited on-top of the interface material. A deposited release layer material allows for the contact area between the interface material and the substrate to be controlled. These tests differ in geometry but share the same generic methodology and can be used for a number of material systems over a wide range of mode mixity. This paper presents the methodology and implementation of the MDT and SSDT tests and compares results to better understand their scope. A case study of the interfacial fracture toughness as a function of mode mixity for titanium and silicon interface was performed to determine which test should be used for low-k dielectric (Black $Diamond^{TM})$ and tantalum. Lastly, ongoing research on low-k and tantalum interface is discussed. |
| Starting Page | 1384 |
| Ending Page | 1389 |
| File Size | 3176399 |
| Page Count | 6 |
| File Format | |
| ISBN | 1424409845 |
| ISSN | 05695503 |
| DOI | 10.1109/ECTC.2007.373975 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-05-29 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Silicon Dielectric thin films Delamination Stress Sputtering Materials testing Substrates Thin film devices Microelectronics Microelectromechanical devices |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
National Digital Library of India (NDLI) is a virtual repository of learning resources which is not just a repository with search/browse facilities but provides a host of services for the learner community. It is sponsored and mentored by Ministry of Education, Government of India, through its National Mission on Education through Information and Communication Technology (NMEICT). Filtered and federated searching is employed to facilitate focused searching so that learners can find the right resource with least effort and in minimum time. NDLI provides user group-specific services such as Examination Preparatory for School and College students and job aspirants. Services for Researchers and general learners are also provided. NDLI is designed to hold content of any language and provides interface support for 10 most widely used Indian languages. It is built to provide support for all academic levels including researchers and life-long learners, all disciplines, all popular forms of access devices and differently-abled learners. It is designed to enable people to learn and prepare from best practices from all over the world and to facilitate researchers to perform inter-linked exploration from multiple sources. It is developed, operated and maintained from Indian Institute of Technology Kharagpur.
Learn more about this project from here.
NDLI is a conglomeration of freely available or institutionally contributed or donated or publisher managed contents. Almost all these contents are hosted and accessed from respective sources. The responsibility for authenticity, relevance, completeness, accuracy, reliability and suitability of these contents rests with the respective organization and NDLI has no responsibility or liability for these. Every effort is made to keep the NDLI portal up and running smoothly unless there are some unavoidable technical issues.
Ministry of Education, through its National Mission on Education through Information and Communication Technology (NMEICT), has sponsored and funded the National Digital Library of India (NDLI) project.
| Sl. | Authority | Responsibilities | Communication Details |
|---|---|---|---|
| 1 | Ministry of Education (GoI), Department of Higher Education |
Sanctioning Authority | https://www.education.gov.in/ict-initiatives |
| 2 | Indian Institute of Technology Kharagpur | Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project | https://www.iitkgp.ac.in |
| 3 | National Digital Library of India Office, Indian Institute of Technology Kharagpur | The administrative and infrastructural headquarters of the project | Dr. B. Sutradhar bsutra@ndl.gov.in |
| 4 | Project PI / Joint PI | Principal Investigator and Joint Principal Investigators of the project |
Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon |
| 5 | Website/Portal (Helpdesk) | Queries regarding NDLI and its services | support@ndl.gov.in |
| 6 | Contents and Copyright Issues | Queries related to content curation and copyright issues | content@ndl.gov.in |
| 7 | National Digital Library of India Club (NDLI Club) | Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach | clubsupport@ndl.gov.in |
| 8 | Digital Preservation Centre (DPC) | Assistance with digitizing and archiving copyright-free printed books | dpc@ndl.gov.in |
| 9 | IDR Setup or Support | Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops | idr@ndl.gov.in |
|
Loading...
|