NDLI: Laser processing of YBCO thin films on sapphire for microwave applications

Content Provider	IEEE Xplore Digital Library
Author	Sang Yeol Lee
Copyright Year	2002
Abstract	Laser ablation has been used to fabricate YBa/sub 2/Cu/sub 3/O/sub 7-x/(YBCO) thin film on sapphire substrates for microwave applications. The Interfaces between the YBCO laser ablated thin films and the r-plane Al/sub 2/O/sub 3/ substrates have been investigated by a transmission electron microscopy (TEM) and an Auger electron spectroscopy (AES) depth profile. The PrBa/sub 2/Cu/sub 3/O7-x (PBCO) buffer layer has been used to prevent the interdiffusion. The interfaces of YBCO/Al/sub 2/O/sub 3/ and YBCO/PBCO/Al/sub 2/O/sub 3/ have been compared. The intermediate diffusion layer in the YBCO film deposited on bare sapphire was visible between the film and the substrate but no diffusion layer between the YBCO/PBCO thin film and the substrate was observed directly by the cross-section image of TEM. The thickness of the diffusion layer on bare sapphire is about 300 /spl Aring/. This result of TEM is consistent with that of AES depth profile. We have fabricated a perturbed superconducting ring resonator on PBCO buffered sapphire for the microwave application. A fundamental resonance peak split was observed in the frequency range of 7.0-8.4 GHz.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	1486
Ending Page	1489
Page Count	4
File Size	848522
File Format	PDF
ISSN	10518223
Volume Number	7
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Masers Yttrium barium copper oxide Transistors Substrates Laser ablation Transmission electron microscopy Spectroscopy Buffer layers Superconducting thin films Sputtering
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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