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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Barner, J.B. Kleinsasser, A.W. Hunt, B.D. |
| Copyright Year | 2002 |
| Abstract | Superconductor-Normal-Superconductor (SNS) edge Josephson Junctions (JJs) continue to be a focus of high-T/sub c/ superconductor (HTS) electronics development. The ability to form clean edges in HTS materials is essential for successful SNS edge JJs as well as crossovers and via contacts. We report a novel SNS JJ fabrication process in which a YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta///SrTiO/sub 3/ base electrode/insulator bilayer coated with a polyimide passivation layer is rotated during Ar ion milling through a reflowed photoresist mask to form omnidirectional edges. No sample cooling is used during milling. YBa/sub 2/Cu/sub 2.8/Co/sub 0.2/O/sub 7-/spl delta// normal layers and YLa/sub 0.05/Ba/sub 2/Cu/sub 3/O/sub 7-/spl delta// counter-electrodes completed the SNS JJ's. Devices fabricated using this polyimide passivation layer have significantly smaller spreads in critical current and resistance than those processed without it. |
| Sponsorship | Council on Superconductivity Appl. Superconductivity Conference Inc MIT |
| Starting Page | 2502 |
| Ending Page | 2505 |
| Page Count | 4 |
| File Size | 639579 |
| File Format | |
| ISSN | 10518223 |
| Volume Number | 7 |
| Issue Number | 2 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1997-06-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Josephson junctions Superconducting devices High temperature superconductors Polyimides Passivation Milling Superconducting materials Fabrication Electrodes Gas insulation |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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