NDLI: Implementation and characterization of a tunable quality factor micromachined inductor

Content Provider	IEEE Xplore Digital Library
Author	Yu-Che Huang Ben-Hwa Jang Weileun Fang
Copyright Year	2009
Description	Author affiliation: Material and Chemical Research Lab., Industrial Tech. Research Inst., Chutung, Hsinchu, TAIWAN (Ben-Hwa Jang) \|\| Power Mechanical Eng. Dept., National Tsing Hua University, Hsinchu, TAIWAN (Yu-Che Huang; Weileun Fang)
Abstract	This study demonstrated a novel tunable quality factor and self-assembly inductor using an alternating magnetic flux. The merit of the design was to tilt the inductor from the lossy substrate and localize welding for assembly simultaneously using the magnetic film. The 8-turn of meander strip inductor with a thickness of 10 µm was fabricated using MicroElectroMechanical Systems (MEMS) technology. The RF performance of the inductor at various tilting angles away from the substrate (0°, 45°, and 90°) was characterized by using a two-port vector network analyzer (VNA). The measurement results indicated that the quality factor (Q) and the self-resonant frequency (fres) can be enhanced about 107% and 1.08%, respectively.
Starting Page	550
Ending Page	553
File Size	1799196
Page Count	4
File Format	PDF
ISBN	9781424443413
DOI	10.1109/IMPACT.2009.5382242
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-10-21
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnetic films Microelectromechanical systems Magnetic flux Strips Self-assembly Q factor Welding Inductors Substrates Assembly
Content Type	Text
Resource Type	Article

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