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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Qinggang Liu Yiping Li Wenyong Zhao Xiaotang Hu |
| Copyright Year | 2007 |
| Description | Author affiliation: State Key Lab. of Precision Meas. Technol. & Instrum., Tianjin Univ. (Qinggang Liu; Yiping Li; Wenyong Zhao; Xiaotang Hu) |
| Abstract | An optical non-contact and compact two dimensions angular sensor for micro angle measurement and nanometer scale measurement is introduced in the paper. The light beam emits from the angular sensor to the micro target and then is reflected back into the sensor. The angular sensor is designed based on optical differential method which adopts two orthogonal optical inner-reflection critical angle prisms. A microprocessor control unit (MCU) is used to carry out the signals' collection, processing, display, communication and control signal's output via upper computer. The measurement resolution is better than 0.05arcsec when the measurement range is set to be plusmn 600arcsec. Moreover, the sensor has the merits of adjustable resolution/range and can measure two dimensional angular displacements synchronously. |
| Starting Page | 274 |
| Ending Page | 277 |
| File Size | 4317847 |
| Page Count | 4 |
| File Format | |
| ISBN | 1424406102 |
| DOI | 10.1109/NEMS.2007.352025 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-01-16 |
| Publisher Place | Thailand |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical sensors Stimulated emission Communication system control Signal processing Computer displays Signal resolution Goniometers Optical design Microprocessors Displacement measurement two-dimension critical angular sensor inner-reflection MCU micro angle measuremen |
| Content Type | Text |
| Resource Type | Article |
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