NDLI: Nanofabrication of Mesoporous Pt Electrode on Micro Pillars for CMOS Integrated micro-LOC Applications

Content Provider	IEEE Xplore Digital Library
Author	Hye-Kyoung Seo Jae-Yeong Park
Copyright Year	2007
Description	Author affiliation: Dept. of Electron. Eng., Kwangwoon Univ., Seoul (Hye-Kyoung Seo; Jae-Yeong Park)
Abstract	In this paper, a newly proposed non-enzymatic Pt electrode, mesoporous Pt on micro pillars Pt electrode, is designed, fabricated, and characterized on silicon substrate by using bulk micromachining and nano technologies. The fabricated micro/nano Pt electrode has cylindrical hexangular arrayed nano Pt pores with a diameter of 3.2 nm which is formed on top of the micro pillars Pt electrode with approximately 6 mum in diameter, 6 mum in space, and 50 mum in height. The measured current responses of the fabricated plane Pt, mesoporous Pt, and mesoporous Pt on the micro pillar Pt electrodes are approximately 9.9 $nA/mm^{2},$ 6.72 $muA/mm^{2},$ and 7.67 $muA/mm^{2}$ in 10mM glucose solution with 0.1M phosphate buffered saline (PBS) solution, respectively. On the other hand, the measured current responses of the fabricated plane Pt, mesoporous Pt, and mesoporous Pt on the micro pillar Pt electrodes are approximately 0.15 $muA/mm^{2},$ 0.56 $muA/mm^{2},$ and 0.74 $muA/mm^{2}$ in 0.1 mM ascorbic acid (AA) solution with 0.1 M phosphate buffered saline (PBS) solution, respectively. This experimental results show that the proposed micro/nano Pt electrode is highly sensitive and promising for CMOS integrated and electrochemical analysis based non-enzymatic micro-LOC applications. Since the proposed micro/nano Pt electrode can also be simultaneously fabricated with the micro-fluidic mixer with the micro pillar structure, the LOCs (laboratory-on-a-chip) can be much smaller, cheaper, and easier to be fabricated.
Starting Page	909
Ending Page	912
File Size	4128473
Page Count	4
File Format	PDF
ISBN	1424406102
DOI	10.1109/NEMS.2007.352165
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-01-16
Publisher Place	Thailand
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanofabrication Mesoporous materials Electrodes Space technology Current measurement Silicon Micromachining CMOS technology Sugar Lab-on-a-chip Biosensors Mesoporous Pt Micro pillars LOC CMOS integrated Non-enzymatic
Content Type	Text
Resource Type	Article

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