NDLI: Special Invited Lecture: Integrated MEMS Sensors

Content Provider	IEEE Xplore Digital Library
Author	Xia, Shanhong
Copyright Year	2007
Description	Author affiliation: Institute of Electronics, Chinese Academy of Sciences, China. (Xia, Shanhong)
Abstract	Monolithic ISFET (ion-sensitive field-effect transistor) pH sensor and microelectrode amperometric immunosensor based on the micro fabrication technology have been studied. The Monolithic ISFET sensor, including the differential ISFET/REFET sensing device and the signal-processing circuit integrated on a single chip, was fabricated by standard CMOS and MEMS technology. Polypyrrole were electropolymerized at different voltage on ISFET gate and REFET gate to form ion-sensitive membrane and ion-insensitive membrane. Micro and compatible amperometric immunosensor, composed of micro electrodes and micro reaction pools, was developed by MEMS technology. Bireceptor molecules were immobilized on the sensitive area of the electrode surface by the technology of self-assembled monolayers. The immunosensor was characterized by detection of immunoglobulin G and ¿-fetoprotein. Both kinds of the sensors show attractive advantages, such as miniaturization, compatibility with CMOS techniques, easy to be designed into micro array and enables relatively rapid, reliable and inexpensive field-analysis.
File Size	876613
File Format	PDF
ISBN	1424406102
DOI	10.1109/NEMS.2007.351988
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-01-16
Publisher Place	Thailand
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices CMOS technology Integrated circuit technology Sensor arrays Biomembranes Electrodes FETs Amperometric sensors Microelectrodes Fabrication
Content Type	Text
Resource Type	Article

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