NDLI: Special Invited Lecture: Improving the Performance of MEMS Actuators Using Feedback Control

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10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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Acknowledgement of Financial Sponsors

Information on IEEE-NEMS Plenary Seakers

Plenary Speech: Micro- and Nano-Technologies for Automotive Research

Plenary Speech: Nano-photonics

Plenary Speech: Spin Excitation Spectroscopy with the STM

Plenary Speech: Nanotechnology: Practical Systems and Integration with MEMS

Plenary Speech: 3D Nano-photonics

Information on IEEE-NEMS Invited Seakers

Special Invited Lectures: Surface NanoBiotechnology

Special Invited Lecture: Integrated MEMS Sensors

Special Invited Lecture: Improving the Performance of MEMS Actuators Using Feedback Control

Special Invited Lecture: Medical Nanotechnology for Preserving Cardiovascular Health and Treating Cardiovascular Diseases

Special Invited Lecture: Implant Micro/Nano Systems for Bio-Medical Applications

Special Invited Lecture: Thermoelectric Energy Conversion in Nanostructures

Special Invited Lectures: Microfabrication and Nanostructure Processing of Advanced Biological Systems

Special Invited Lecture: Integration of Nanostructures with Microsystems

IEEE-NEMS Commercialization Workshop Speaker List

Workshop Speech: Commercialization of MEMS/NEMS in Tohoku University Open Collaboration

Workshop Speech: Role of University Research for Open Innovations in MNT

Workshop Speech: Case Study: The Commercialization of Multi-Axis Inertial sensor Technology

Workshop Speech: Seawater Desalination by RO membrane

Workshop: "MEMS" Commercialization and Future Vision

Workshop: Micro Joining Techniques to Enable Product Miniaturization

Workshop: Recent Trends of Mirco/Nanotech Commercialization in Asia

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Table of contents

Welcome Message

The Simulation for Pressure Loss of Microchannel Heat Sinks Inlet

Sol-gel Combustion Hybrid Method for Nano-oxide Synthesis

Fabrication and Characterization of Nanostructured Ta-Si-N Films

Fluorescence Visualization of Carbon Nanotubes Using Quenching Effect for Nanomanipulation

Microstructural Control of LSM/YSZ Composite Cathode for Lower Temperature Operation of SOFC

I-V Characteristic of the Au Nanorod According to the Contact Materials

Development Of pCO2 Analytic System Using Soft-Lithography Method

Three-dimensional Electrochemical Micromachining on Metal and Semiconductor by Confined Etchant Layer Technique (CELT)

Micro Assembly by Micro Resistance Welding with Electro-Thermal Actuators

The Effects of Mechanical Thin-film Properties on the Pyroelectric Signals

Chitosan Clad Manganese Doped Zinc Suiphide Nanoparticles as Biological Labels

Growth Process of Novel Thin Films by Directed Self Organization of Nanoparticles

Layer by Layer Self-Assembly of Immunoglobulins for Piezoelectric Biosensors

Design and Evaluation of the Nanorod Arrangement Pattern using Electro-magnetic Field Effect

Meniscus Pinned Variable-focus Liquid Lens Based on Electrowetting-on-dielectric

New Nanostructured Electrode Material for Electrochemical Supercapacitors

Transparent Silica Aerogels through Ternary Azeotropic Mixture

Deposition and Characterization of Layer-by-Layer Nano Self-Assembled Carbon Nanotube Multilayer Thin Films

Characteristics of the PPy Material as pH Sensitive Membrane

Nano Self-Assembled Nanoparticle Ion-Sensitive Field-Effect Transistors for Acetylcholine Biosensing

In-situ doped and laser annealing of PECVD SiC thin film

Micro Fluidic System by Integrating Pressure Sensor Arrays with a Micro-Channel

Design and Microfabrication of Innovated FBAW Filters Based on an OOK Receiver Using 0.18um CMOS Technology

Developing Intelligent Robotic Biomanipulation System using Haptic Interface

Enzymatic Biosensors towards a Multiplexed Electronic Detection System for Early Cancer Diagnostics

Nanopatterning with Extreme Ultraviolet Interference Lithography for Nanoelectronics and Biotechnology

Forensic Fingerprint Enhancement using Bioadhesive Chitosan and Gold Nanoparticles

Thermal Bimetallic Microactuators by Ni and Ni-diamond Nanocomposite

Heterogeneous Vesicle Arrays for Biosensing Applications

Mechanical Properties and Deformation Behavior of ZnO Thin Films under Illumination

Effect of Amorphous Si Thickness on the Formation of SiC Nanoparticles during High Vacuum Annealing

The Study of Microfluidic Chip with Micro Cylindrical Post Array for Separating Particles

Application of Micro Sensors on Diagnosis of Micro Fuel Cells

A Novel Rotary Drum Filtering Photoreactor for Wastewater Treatment Using Titanium Dioxide Nanoparticles

A Novel Fabrication Method of Microlens Array by Surface Tension and Injection Process

Fabrication of Three Dimensional X-ray Mask using MEMS Technology

The Study of Flexible Plate Wave Device for Micro Pumping System

A Single PDMS Based Chip for E. Coli Bacteria Lysis, DNA Extraction and Amplification

Local Synthesis of Single-walled Carbon Nanotubes on Zeolite-covered Silicon Substrate by Laser-heating Chemical Vapor Depositon

The Effect of the TiOx Line Width on the Tunneling Phenomenon

An RC-Model for Dielectrophoresis of Ellipsoidal Cells: A Method for Determnination of Dielectric Properties

pH-Sensitive PP/Clay Nanocomposites for Beverage Smart Packaging

Effect of pH on the Formation of Porous Clay Heterostructures (PCHs) and Hybrid PCHs (HPCHs)

Fabrication of Micro-tips by Lift off Process with Contact Shadow Masking

A Theoretical Model for Laser Assisted Direct Imprinting (LADI)

Synthesis of Polybenzoxazine and Nano-Barium Titanate for a Novel Composite

The Nusselt Number in Single-Phase Liquid Flow Forced Convection in Microchannels

Rapid Fabrication of CNT Sensors Using Electro-chemical Deposition of Functionalized CNTs

Optimal FOM Designed Piezoelectric Microgenerator with Energy Harvesting in a Wide Vibration Bandwidth

New Design of a Compact Parallel Micro-Nano Two-Fingered Manipulator Hand

Human Blood Cell Sensing with Platinum Black Electroplated Impedance Sensor

An Inductance-based Sensor for DNA Hybridization Detection

Investigations on Actuation Critical Response Voltage for IPMC Based on Modified EVOH lonomer

A Dielectrophoretic Single-Cell Trapping Chip with Multiple Electrodes and Arrayed 3D Microstructures

A Dual-Mode Radio Frequency DNA Sensor

Design of Readout Circuits Used for Micro-machined Capacitive Accelerometer

A Calibration Method for MEMS Inertial Sensors Based on Optical Tracking

Nanoscale Cutting, Bending and Welding in a Nanoassembly

Manipulation of Phospholiposome in Microfluidic Channel Using Lorentz Force

Numerical Simulation and Optimal Design on a new Dielectrophoretic-based Cytosorter

A Novel Fabrication for Pressure Sensor with Polymer Material and Its Characteristic Testing

Growth of III-V Nanowires and Nanowire Heterostructures by Metalorganic Chemical Vapor Deposition

3D High Aspect Ratio Micro Structures Fabricated by One Step UV Lithography

3-D Simulation of Bosch Process with Voxel-Based Method

Fabrication of High Current Emitting Cold Cathodes Based on Carbon Nanofiber Films Synthesized Using Electroplated Nickel Catalyst

CMOS MEMS Lorentz Force Dual-axis Scanning-Stage

Electrohydrodynamic (EHD) Micro-Boat

Fabrication of 3-D submicron glass structures by FIB

Micro Mass Spectrometer Using Triode Electron Emitters with a Planar Carbon-Nanoparticle Cathode as Ion Source

Multi-Wavelength Fluorescence Detection for a High-Throughput CE System under a Spectrum Equipped Diascopic Microscope Configuration

The Effect of Substrate Temperature on Structure and Optical Properties of Copper (II) Phthalocyanine (CuPc) Thin Films Prepared by Organic Evaporation

Micro Sorters with 3D Focusing and Continuous Sorting

Design and system-level simulation of a capacitive dual axis accelerometer

Magnetic and Magnetotransport Properties of Annealed Amorphous $Ge_{1-x}Mn_{x}$ Semiconductor Thin Films

Universal Concept for Fabricating Arbitrary Shaped μIPMC Transducers and Its Application on Developing Accurately Controlled Surgical Devices

Stem Cell Differentiation Base on Acoustic Wave Sensor

Crystalline Structure and Morphology of ZnSe/CuPc Hybrid Thin Film prepared by Electron Beam Evaporator

Fabrication of 3D Photoresist Microstructures for the Polymer Vertical Comb Drive

Fabrication of Microneedles

Blue Emission Mechanism of NPB/ZnSe Hybrid Structure

ITO Thin Films prepared by Gas-Timing RF Magnetron Sputtering for Transparent Flexible Antenna

Preparation of a New Ionic Polymer-metal Composite

Modulation Spectroscopy Study of Inorganic-Organic Hybrid Quantum Well-like Nanostructures

Fabrication of a Complicated Heat Transfer Microchannel System for CPU Cooling Study

On-chip Temperature Sensing and Control for Cell Immobilization

Design and Simulation of a Rhombic Micromixer for Rapid Mixing

InP Ring-like Nanostructures on Ino.49Gao.51P Grown by Droplet Epitaxy

High Performance Ethanol Sensor for Control Drunken Driving Based on Flame-made ZnO Nanoparticles

Microwave Performance Dependence of BST Thin Film Planar Interdigitated Varactors on Different substrates

Measurement of Linewidth for Nano-scale Lines Prepared by Multilayer Thin Films

Development of a Capillary Electrophoresis Microchip Format Electrochemical Detector for the Sensing of Endocrine Disruptors

Flip-Chip Micro-Thermal Stress Simulation in Underfill Process

ITO-coated glass/polydimethylsiloxane continuous-flow PCR chip

Visible Photoluminescence from InGaPN/GaP Lattice-Matched Single Quantum Well Structures Grown by MOVPE

Characterization of MOVPE Grown $GaAs_{1-x}N_{x}/GaAs$ Multiple Quantum Wells Emitting Around 1.3-μm-Wavelength Region

Study of Noninvasive Sampling of Subcutaneous Glucose by Reverse Iontophoresis

A Microfluidic Device for Capture of Single Cells and Impedance Measurement

Fabrication of SixNy Nanomechanical Structures Using Traditional Lithography and Gas Isotropic Etching

Compact Vision System Design and Application on a PDMS Chip

A Novel Electrolysis-Bubble-Actuated Micropump via Roughness Gradient Design of the Hydrophobic Lateral Breather

Labelling of Biological Cells with Magnetic Particles in a Chaotic Microfluidic Mixer

Laser Assisted Roller Imprinting

Selective Growth of CNT on Ni/Cu Substrate

Energy Dissipation in Folded-Beam MEMS Resonators Made from Single Crystal and Polycrystalline 3C-SiC Films

Development of an Innovative Micro Capacitive Humidity Sensor With Double Polyimide Films and Interlacing Out-of-plane Electrodes Structure

Design and Fabrication of a Column-type Microthermoelectric Cooler with Bismuth Telluride and Antimony Telluride Pillars by Using Electroplating and MEMS Technology

Design and fabrication of a 3-D nanogap electrode grid array biosensor

Analysis of Line width with Nano Fountain Pen Using Active Membrane Pumping

Etching Behavior of Silicon Using CO2 Laser

Optical Properties and Structure of Copper (II) Phthalocyanine(CuPc) Organic Thin Film Grown by Electron --Beam Evaporation Technique

The Simulation Study of Bio-particle Trapping with Electrodeless Dielectrophoresis

Synthesis of High Quality ZnO Nanorods by Low Temperature Wet Chemical Process

Fabrication of Nano Channels Using IBE for Nanofluidics Study

A Drug Delivery System Based on Polymer Nanotubes

Fabrication of Titania Nanopoles by Nanoporous Alumina Template

A Contact Nano-Imprinting for Direct Metal Transfer Based on Infrared Pulsed Laser Heating

Cell Migration Driven by a Mechanical Stiffness Gradient

Microfilter Fabricated with PDMS and PES Membrane Applicable for Implantable Artificial Kidney

A Novel Architecture of High Optical Non Linearity in Carbon Nanotube Based Nano Fiber Optic for Future Quantum Communication

Development of Optical Fibre Sensors for Online pH Monitoring in Microbioreactors

A Micromachined Platform for Three Dimensional Dielectrophoretic Assembly of Gold Nanoparticles for Nanodevices

Experimental Study on Resonant Response of Piezoresistive Double-clamped (111)-Si Nano-beam

Design of a Novel MEMS IDT Dual Axes Surface Acoustic Wave Gyroscope

Multilayer Electrodes DEP Chip for Single-cell Level Impedance Measurement

An Electrohydrodynamic Micropump for On-Chip Fluid Pumping on a Flexible Parylene Substrate

Hopping and Drift--Diffusion Currents in Organic Devices

Planar Variable-Focus Liquid Lens Based on Electrowetting on Dielectric

Effect of Ion Depth in Low Energy Ion Scattering Spectroscopy for Evaluating Nanostructures

A Novel Piezo-driven Nanopositioning Mechanism for Precise Manipulating

Development of Bio-chemical Sensor System Integrated with Blood Extraction Device

Electrode Preparation and Electro-deformation of Ionic Polymer-metal Composite (IPMC)

Photocatalytic Oxidation and Alkylation Processes in Microreactors

Nonlinear Optical Properties of SWCNTs Incorporated Silica Composites

Correct DC Operation in RTD-based Ternary Inverters

Chip-Scale Localized Synthesis of Carbon Nanotubes on Copper Microstructures via Inductive Heating

Characterization of Parylene as a Water Barrier via Buried-in Pentacene Moisture Sensors for Soaking Tests

Electronic Detection of Micro RNA Mir2O6 with Molecularly-Differentiated Nanoelectrodes

Electrospun Ordered Nanofibers on Si and SiO2 Substrate

Anchor Loss Reduction in Resonant MEMS using MESA Structures

Nanomechanical Chemical Sensor Platform

Reversibly bonded nanocapillaries by electrostatic forces

Carbon Nanotube-based Nanoprobe Electrode

Selective Functionalization of Silicon Micro/Nanowire Sensors via Localized Joule Heating

The Effects of Different Flow Channels on Silicon-based Micro Direct Methanol Fuel Cells

Nanofabrication of Mesoporous Pt Electrode on Micro Pillars for CMOS Integrated micro-LOC Applications

Electrolysis-based Parylene Balloon Actuators for Movable Neural Probes

Study on Space Morphology of Molecular Structure of Tungsten Trioxide Compound Film Surface by AFM

A Study on Theoretical Nano Forces in AFM Based Nanonmanipulation

Formation of Au Colloidal Crystals for Optical Sensing by DEP-Based Nano-Assembly

Self-Assembled Heterogeneous Integrated Fluorescence Detection System

On-Chip Continuous Blood Cell Subtype Separation by Deterministic Lateral Displacement

Atomistic Simulation of Non-Degeneracy and Optical Polarization Anisotropy in Pyramidal Quantum Dots

Molecular Combing For Stretching Single-Stranded Phage Genomes on Conductive Graphite Surfaces

Electrical Conductivity of Hexagonal Ba(Ti0.90Mn0.10)O3 Ceramics

Enhanced Droplet Mixer by LDEP on Spiral Microelectrodes

Integrated Bioinformatics analysis of structural differences in metabolic pathways. An application to Mycobacterium Leprae

Nanoparticle SnO2 Gas Sensor with Circuit and Micro Heater on Chip Fabricated Using CMOS-MEMS Technique

Non-Equilibrium Molecular Dynamics Approach for Nano-Fluidics and Its Applications

A Wet Etching Post-process for CMOS-MEMS RF Switches

Single-Molecule Detection in Temperature-Controlled Microchannels

The Preparation of Self-formed PDMS Nanostructures by RIE Etching

Realizing Temperature-Controlled Digital Microfluidic Chips with Versatile Microelectrodes

Fabrication of Position-controllable GaN Nanostructures

Nanoscale Dot Patterning by Anodic Oxidation with Atomic Force Microscope

A Monolithically Fabricated Combinatorial Mixer for Microchip-Based High-Throughput Cell Culturing Assays

Programmed Affinity Extraction of Molecules on a Microfluidic Platform

Microstructure Fabrication with Conductive Paste Dispensing

Preparation of Novel Core-shell Nanoparticles as Non-viral Gene Delivery Vectors: Surface Charge, Particle size, and Morphology

Antibacterial Effect of apatite coated Titanium Dioxide for Textiles and Coating Applications

Improved anti-dust mite properties of textiles by eugenol loaded chitosan nanoparticles

Production and Characterization of Rice bran extract encapsulated in Solid Lipid Nanoparticles for Dermal Delivery

Non-Crosshybridizing Oligonucleotide Building Blocks for Accurate, Scalable Nanofabrication

An Aligned Carbon Nanotube Biosensor for DNA Detection

Polymer-Enabled Carbon Nanotube Deposition for Cellular Interrogation Applications

Attenuation of Cellular Inflammation Using Glucocorticoid-Functionalized Copolymers

DNA-Directed Self-Assembly of Microscopic 1-D Carbon Nanotube Wire

Smart Steel Plate Structures

Numerical Analysis and Optimization of Insulator-based Dielectrophoresis Devices for Cell Sorter Applications

High Performance Piezoresistive Micro Strain Sensors

The Infinite Dimensional Control of Flexible Cantilevers in AFM Based Nanomanipulation

Mechanobiological Signal Transduction in Differentiating Chondrocyte and New Configuration for Mechanical Stress Culture

Preparation of Ultrafine Poly(ethylene oxide)/Poly(ethylene glycol) Fibers Containing Silver Nanoparticles as Antibacterial Coating

A Contact Angle Measurement Method for the Droplets in EWOD-based Chips

An Axisymmetric Model for Diffusion of Nano-Particles

Novel Carbon Nanotube Deposition System for Fabricating Nano Devices

New Screen-printed Thermal Microactuator

Microfabrication of High-Density Microelectrode Arrays for Peripheral Intraneural Applications

Synthesis of Poly(vinyl pyrrolidone)-Stabilized Silver Nanoparticles

Immunogold Nanoparticle Combing Surface-Enhanced Raman Scattering Method for Protein A Detection

Characteristics of Cholesteryl Cetyl Carbonate Liquid Crystals as Drug Delivery Systems

Factors Influencing the Properties of Rifampicin Liposome and Applications for Dry Powder Inhaler

Effects of the Second Step Annealing Time and Temperature in Two Steps Annealing on Low Temperature Poly-Silicon Film Fabrication

Electrorotation: Diagnostic Tool for Abnormality of Marine Phytoplankton Cells

Minimally Invasive Electrical Impedance Measurements of Ovum Exemplified Using Microelectrodes

Study on the Cell Mechanics of MDCK Cells by Elastic Micro-pillars Arrays

Study on the Gelsolin Effects in Oral Epithelia Carcinoma (OEC) Cells by Atomic Force Microscopy and Micro-pillars Arrays

Recognition of Membrane Receptor by Atomic Force Microscopy

Effect of the electric field on the linear polarization property of binary quantum dots

The Effects of Substrate Mounds and Pits on the Periodicity of Cross-Hatch Surface and Subsequent Formation of Quantum Dots

High Efficiency Quantum Dot Molecule Solar Cells for High Concentration Sunlight Application

Application of Conductometric Capillary Electrophoresis Microchip in Detect Organic and Inorganic Ions

Guided Magnetic Actuator for Active Capsule Endoscope

Design and Fabrication of An Ultrasonic Microdevice for Microparticles Separation

Effects of Adhesive on Silicon Microgyroscopes

Acoustic Analysis of Single-Walled Carbon Nanotube-based Vacuum Sensor

Sample Clean-up of Red Fluorescent Protein for Analysis Using Electric Field in Microfluidic Device

1D and 3D Shaped Ionic Liquid/Aluminum Hydroxide Nanohybrids for Electrochemical Device

Manipulation of Bioparticles on Electrodeless Dielectrophoretic Chip Based on AC Electrokinetic Control

Fabrication of Nanowire Arrays Using Diblock Copolymer

Etching Effect on Exchange Anisotropy in NiFe/Cu/NiFe/IrMn Spin-valve Structure for an Array of PHR Sensor Element

Doped Cobalt Ferrites for Stress Sensor Applications

Solving the "Pull-in" Instability Problem of Electrostatic Microactuators using Nonlinear Control Techniques

Design and Fabrication of Micro Multi-Probe Electrode Arrays

A 3D-3C Micro-PIV Method

Effect of prepared conditions on soft magnetic properties and microstructure of CoFeHfO thin film

Three Novel Nano Particles Cytotoxicity Activity Evaluation

Preparation of Ni/PPy Nanowires Modified Electrode and Its Electrocatalytic Activity to Nitrate

SU-8 Buckled-type Microvalves Switched by Surface Tension Forces

Design and Modeling of a CNT-CMOS Low-Power Sensor Chip

Natural Frequencies of Single-Walled Carbon Nanotubes

TiO2 Based Nanocrystalline Thin Film Gas Sensors Prepared by Ion-assisted Electron beam Evaporation

EVOH/Montmorillonite Intercalation Nano-composites

Study of Excimer Laser Electrochemical Etching Silicon

Virtual Operation of MEMS Devices Based on FEM Simulation

Nanoparticle-Amplified Optical Interferometer Biosensor toward Single Molecular Detection

A Molecular Dynamics on the Thermally Developing Flow of Alanine in Nano-Channel

Numerical Simulation of Roughness Effect on Gaseous Flow and Heat Transfer in Microchannels

Elastic Field of a Nano Disk Shape Defect in an fcc Thin Film

Generation Behavior at Normal Pressures and Reactions of Highly Concentrated $O^{-}$

Investigation of Intrinsic Stress Effects in Cantilever Structures

Surface Activated Prebonding in Local Laser Bonding of Silicon and Glass

Nitrogen Doped ZnO Nanomaterials for UV-LED Applications

Hyperthermia Cancer Therapy Utilizing Superparamagnetic Nanoparticles

An Active Flow Focusing Microfluidic Chip Utilizing Controllable Moving Walls for the Formation of Microdroplets in Liquids

The application of Iron Oxide magnetic nanoparticles to improve the binding efficiency of the IgG and Thiol SAMs

Prediction of secondary and tertiary structures of hemoglobin Constant Spring

NEMS Devices for Accelerometers Compatible with Thin SOI Technology

Tracking Control Method of Piezoelectric Actuator for Compensating Hysteresis and Creep

Insulator Film Thickness to Fix the Spacing between Electrodes to Molecular Length Scale

A Novel Bonding Architecture Based on AAO

Studies on MEMS Vacuum Sensor Based on Field Emission of Silicon Tips Array

Enhancement in Electrical Conductivity of Transparent Single-Walled Carbon Nanotube Films

Ethanol Sensor Based on Au-doped ZnO Nanostructures

A wearable humidity sensor with hydrophilic membrane by Soft-MEMS techniques

Morphology of Silicon Nanowires Grown on Si(100) Substrate

Surface Profile and Optical Properties of Sb-doped SnO2 Thin Films

Completely Parylene-Coated Neuroprobe for Chronic Recording

Single crystalline metal oxide nano-wires/tubes: controlled growth for sensitive gas sensor devices

Design and Manufacture of Novel MEMS-based Dielectrophoretic Biochip

A Bulk Micromachined Si-on-glass Tunneling Accelerometer with Out-of-plane Sensing Capability

Analysis of the Packaging Stresses in Monolithic Multi-Sensor

Non-woven Membranes of ODPA-ODA Polyimide Prepared by Electrospinning

A Novel Half-Adder Using Single Electron Tunneling Technology

Nanostructured Silicon Carbide Molds for Glass Press Molding

Assembly and Characterization of Nanodevice using Carbon Nanotubes and Nanowires

Nonlinear Transmembrane Current Response of Micro Elelectroporation for Human Cancer Cells

A Micro CE Chip for In-column Urea/Urease Reaction and Electrochemical Detection Utilizing Integrated Gold Nanoelectrode Ensemble (GNEE)

Development of AFM Based on Nano Positioning Stage

Data Analysis Method for MEMS Dynamic Characterization Based on Stroboscopic Interferometer System

Two Dimensions Angular Sensor for Micro/Nano Measurement

Extracting the Young's Modulus and Stress Gradient of Thin Films from the Pull-in Voltage of a Micro Curled Cantilever Beam

Resonance charaterizaion of multi-wall cabon nanotubes

Peeling and Cutting a Multi-Walled Carbon Nanotube inside a Scanning Electron Microscope

Fabrication and Characterization of carbon nanotube tip modified by focused ion beam

Design and Fabrication of In-Vitro Electroporation Chip for Gene Transfection

IntelliSuite® EMagAnalysis: an S-parameter Extraction Tool for Real Deformed Structures

Qualitative Analysis of Surface Energy Using Atomic Force Microscopy Approach

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Special Invited Lecture: Improving the Performance of MEMS Actuators Using Feedback Control

Content Provider	IEEE Xplore Digital Library
Author	Lewis, Frank.L.
Copyright Year	2007
Description	Author affiliation: Prof., Moncrif-O'Donnell Endowed Chair, University of Texas, Arlington, USA. (Lewis, Frank.L.)
Abstract	As MEMS actuators are used for increasingly challenging applications, greater reliability, speed, and performance accuracy are needed. Increasing demands are reaching a point where mechanical design improvements alone cannot provide further improvements in performance. Alternative approaches, such as open-loop or closed-loop control driving strategies, must be used instead. The presence of system vibratory modes has introduced additional challenges for controller design. This talk will explore applications where closed-loop feedback control strategies can be successfully used to improve MEMS actuator performance. The talk focuses on electrostatic MEMS actuators. Experimental results are provided to show the effectiveness of the feedback control design methods. We design a light intensity control system for a MEMS variable optical attenuator (VOA) that speeds up the response. We design a controller for lateral instability in electrostatic actuators that allows the use of the full range of actuator motion. We design a controller that stabilizes electrostatic microactuators and avoids pull-in, allowing the effective utilization of the entire capacitive gap. We compare the performance of open-loop and closed-loop control strategies, and present experimental results to address the comparative issues involved.
File Size	1014582
File Format	PDF
ISBN	1424406102
DOI	10.1109/NEMS.2007.351989
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-01-16
Publisher Place	Thailand
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Feedback control Open loop systems Electrostatic actuators Optical variables control Electric variables control Control systems Design methodology Optical design Optical control
Content Type	Text
Resource Type	Article

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