NDLI: Anchor Loss Reduction in Resonant MEMS using MESA Structures

Content Provider	IEEE Xplore Digital Library
Author	Pandey, M. Reichenbach, R.B. Zehnder, A.T. Lal, A. Craighead, H.G.
Copyright Year	2007
Description	Author affiliation: Cornell Univ., Ithaca, NY (Pandey, M.)
Abstract	The quality factor of an oscillator is inversely proportional to the damping and is a measure of the width of its amplitude vs. forcing frequency response. For sensing and signal processing applications of microelectromechanical systems (MEMS) oscillators, the quality factor (henceforth called Q) affects the sensitivity and performance of such devices. As MEMS vibrates (resonates) some of its vibrational energy is transmitted to the substrate upon which the MEMS is fabricated. A large component of this energy is carried away as surface acoustic waves (SAW). We demonstrate a design that improves the Q of resonant MEMS oscillators by up to 4times by reflecting surface wave energy back to the MEMS. Wave reflection occurs at trenches fabricated in a circle around the MEMS. The trench creates a "mesa" that provides partial mechanical isolation to the MEMS. The loss of energy due to SAW increases almost exponentially with frequency, with a corresponding decrease in Q. Hence the demonstrated design would become even more useful with the increasing need for higher frequency resonators. The mesa structure presented here is a simple idea which can be easily integrated into existing fabrication procedures and can be used for commercial purposes.
Starting Page	880
Ending Page	885
File Size	6199468
Page Count	6
File Format	PDF
ISBN	1424406102
DOI	10.1109/NEMS.2007.352159
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-01-16
Publisher Place	Thailand
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonance Micromechanical devices Oscillators Surface acoustic waves Q factor Damping Frequency response Signal processing Microelectromechanical systems Vibrations
Content Type	Text
Resource Type	Article

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