NDLI: Local Synthesis of Single-walled Carbon Nanotubes on Zeolite-covered Silicon Substrate by Laser-heating Chemical Vapor Depositon

Content Provider	IEEE Xplore Digital Library
Author	Jin, Y. Kasuya, K. Nagato, K. Morii, H. Ooi, T. Nakao, M.
Copyright Year	2007
Description	Author affiliation: Dept. of Eng. Synthesis, Tokyo Univ. (Jin, Y.; Kasuya, K.; Nagato, K.; Morii, H.; Ooi, T.; Nakao, M.)
Abstract	Single-walled carbon nanotubes (SWNTs) have been locally synthesized on zeolite-covered silicon substrates by laser-heating chemical vapor deposition (CVD). We used laser irradiation as a heat source, Fe/Co nanoparticles supported on zeolite as catalysts, and ethanol vapor as a carbon source. We heated the zeolite catalysts using a Nd:YAG laser at 50 mW with a spot size of about 5mum diameter and synthesized SWNTs in a local area of about 20mum diameter at the irradiation point. We also synthesized SWNTs in a line by scanning the laser irradiation at 800mW at an average speed of 10mum/s. The synthesized SWNTs were characterized by scanning electron microscopy and Raman spectroscopy. To investigate the effect of heating SWNTs by the laser, we irradiated pure SWNTs synthesized by standard CVD in a vacuum furnace using the laser. Furthermore, we succeeded in bridging zeolite islands using SWNTs by laser-irradiating one side of the islands.
Starting Page	462
Ending Page	466
File Size	5050517
Page Count	5
File Format	PDF
ISBN	1424406102
DOI	10.1109/NEMS.2007.352059
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-01-16
Publisher Place	Thailand
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Chemical lasers Carbon nanotubes Silicon Chemical vapor deposition Iron Nanoparticles Ethanol Scanning electron microscopy Raman scattering Spectroscopy laser-heating chemical vapor deposition local synthesis single-walled carbon nanotubes zeolite-covered silicon substrate
Content Type	Text
Resource Type	Article

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