NDLI: An ICP source with a shape-adjustable coil for ULSI

Content Provider	IEEE Xplore Digital Library
Author	Leou, K.C. Tsai, S.J. Che, J.H. Lin, T.L. Tsai, C.H.
Copyright Year	1998
Description	Author affiliation: Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan (Leou, K.C.)
Abstract	Summary form only given. A novel coil design for inductively-coupled plasma (ICP) sources for ULSI processing will be presented. To widen the operation range of processing systems based on ICP high density plasma sources, the coil shape is made adjustable by varying the height of the center post connected to a planar coil. The coil is then essentially shallow-dome-shaped with its height adjustable. As the coil shape changes, the profile of the RF field also changes, which in turn changes the location where the major RF power is deposited. Ideally, one can make use of this extra knob to compensate the changes in plasma uniformity as the system parameters such as gas pressure, RF power or bias power are varied. The other feature of the new coil design is that the coil has two sets of multi-turns winding connected in parallel but 180 degree opposite azimuthally. This arrangement can improve the symmetry of the processing system in azimuth direction which has been shown to be highly dependent on the symmetry of the coil. Initial measurements for a proof-of-principle experiment show that the density profile does change with the coil shape as the gas pressure and RF power are fixed.
File Size	119088
File Format	PDF
ISBN	0780347927
ISSN	07309244
DOI	10.1109/PLASMA.1998.677923
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Coils Ultra large scale integration Radio frequency Plasma sources Shape measurement Plasma density Plasma materials processing Azimuth Density measurement Power measurement
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in