NDLI: Studies of the effects of the bore length during plasma immersion ion implantation of a small cylindrical bore with auxiliary electrode by two-dimensional fluid model

Content Provider	IEEE Xplore Digital Library
Author	Kwok, T.K. Zeng, X.C. Chu, P.K.
Copyright Year	1998
Description	Author affiliation: Dept. of Phys. & Mater. Sci., City Polytech. of Hong Kong, Kowloon, Hong Kong (Kwok, T.K.)
Abstract	Summary form only given. The inner surface modification of many industrial components, such as dies, bushings, pipes, etc, using plasma immersion ion implantation (PIII) has grabbed the attention of physicists and materials scientists. One drawback of the PIII modification of inner surface is low ion impact energy. It has been shown that by inserting a zero potential conductive auxiliary electrode positioned at the axis of the implanted cylindrical bore, the average ion impact energy can be raised. Plasma immersion ion implantation (PIII) of the inner surface of a finite-length small cylindrical bore with a coaxial, grounded auxiliary electrode are calculated using a two-dimensional fluid model. Various ratios of bore diameters against bore lengths are simulated. It is found that the sheath structure resulting from the auxiliary electrode focuses ions from both inside and outside the bore onto the inner surface. If the bore length is long enough, the ions from outside the bore cannot be implanted into the deeper region of the inner surface. Therefore, we can simulate the implantation of the deeper region by a one-dimensional fluid model.
File Size	97766
File Format	PDF
ISBN	0780347927
ISSN	07309244
DOI	10.1109/PLASMA.1998.677723
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Boring Plasma immersion ion implantation Electrodes Plasma simulation Ion implantation Physics Materials science and technology Insulators Conducting materials Coaxial components
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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