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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Guo, X. Scharer, J. Gui, H. Mouzouris, Y. |
| Copyright Year | 1998 |
| Description | Author affiliation: Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA (Guo, X.) |
| Abstract | Summary form only given. We have designed and constructed a radiofrequency helicon plasma source to study Ar and Ar with a mixture of air constituents (N/sub 2/ and O/sub 2/). Experimental measurements of the radial and axial profiles of plasma density, electron temperature, lifetime and wave properties are presented employing Langmuir and B-dot probes. We investigate regimes from lower (1-20 mTorr) to higher gas pressures and the role of wave frequency (2-200 MHz) and magnetic field (200-1000 G) on the wave coupling and plasma profiles. The experimental results will be compared with ANTENA II and MAXEB simulation results which incorporate 1- and 2-D plasma density effects as well as the 2-D coupling antenna. The full electromagnetic and electrostatic character of the helicon wave will be examined. We discuss the dominant chemical and physical processes in air constituents (N/sub 2/, O/sub 2/ and N/sub 2//O/sub 2/) plasmas and examine means to efficiently detach electrons from negative ions and reduce the power budget. |
| File Size | 134732 |
| File Format | |
| ISBN | 0780347927 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1998.677855 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1998-06-01 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Radio frequency Argon Plasma density Plasma measurements Plasma sources Magnetic field measurement Electrons Plasma temperature Plasma properties Plasma chemistry |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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