NDLI: Electron density measurements of moderate pressure microwave-generated hydrogen discharges

Content Provider	IEEE Xplore Digital Library
Author	Story, D. Grotjohn, T.A. Asmussen, J. Vikharev, A. Gorbachev, A.
Copyright Year	1998
Description	Author affiliation: Dept. of Electr. Eng., Michigan State Univ., East Lansing, MI, USA (Story, D.)
Abstract	Summary form only given, as follows. The electron density is measured in a moderate pressure (30-60 Torr) hydrogen discharge and hydrogen-methane discharge using a millimetre wave open resonator technique. The measurement of the electron density is important for quantifying the importance of electron dissociation and thermal dissociation of the molecular gas as a function of discharge operating conditions. Specifically, the measured electron density values are key in helping to verify the accuracy of numerical models of the plasma discharge reactor. The hydrogen discharge is generated using a resonant cavity microwave source excited at 2.45 GHz. The input power of 500-1000 watts generates a plasma discharge above a substrate holder located in a quartz dome of 5 cm diameter. The plasma ball or hemisphere was positioned in the center of the millimeter wave open resonator operating in the frequency range of 30-32 GHz. The mm-wave open resonator operates with a quality factor of approximately 10,000. The shift in the resonant frequency of the resonator when the plasma electrons are present allows the determination of the electron density. The electron densities measured were in the range of 5-8/spl times/10/sup 11/ cm/sup -1/ for the pressure range of 30-60 Torr. Electron density measurements for various reactor parameter settings will be presented including the addition of methane gas to the hydrogen discharge.
File Size	107916
File Format	PDF
ISBN	0780347927
ISSN	07309244
DOI	10.1109/PLASMA.1998.677624
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrons Density measurement Plasma measurements Fault location Hydrogen Plasma density Plasma sources Plasma waves Pressure measurement Inductors
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in