NDLI: Radial analysis of a C/sub 2/F/sub 6/ inductively coupled plasma using optical emission spectroscopy and laser induced fluorescence

Content Provider	IEEE Xplore Digital Library
Author	Shannon, S. Hebner, G. Holloway, J.P. Brake, M.L.
Copyright Year	1998
Description	Author affiliation: Dept. of Nucl. Eng. & Radiol. Sci., Michigan Univ., Ann Arbor, MI, USA (Shannon, S.)
Abstract	Summary form only given, as follows. A C/sub 2/F/sub 6/ discharge in a GEC rf reference cell equipped with an inductively coupled source has been analyzed using laser induced fluorescence and spatially resolved optical emission spectroscopy. Experiments were conducted approximately 1 cm above the lower electrode for C/sub 2/F/sub 6/ and C/sub 2/F/sub 6//Ar discharges at pressures ranging from 5 mTorr to 20 mTorr and inductive electrode power ranging from 100 W to 300 W. A 30 W bias was placed on the bottom electrode for all experiments. A 6 inch bare silicon wafer was used to represent processing conditions. A quartz ring was clamped to the top electrode to provide discharge stability. Radial profiles of optical emission were obtained using a novel glow discharge tomography sensor and regularized inversion solver. The 488 nm SiF line and the 703 nm F line were profiled, as well as the 750.4 nm Ar line in the C/sub 2/F/sub 6//Ar runs in order to conduct spatially resolved actinometry of fluorine. Spatially resolved ground state radical density profiles were measured by laser induced fluorescence.
File Size	107922
File Format	PDF
ISBN	0780347927
ISSN	07309244
DOI	10.1109/PLASMA.1998.677626
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Spatial resolution Optical sensors Argon Fluorescence Stimulated emission Fault location Optical coupling Spectroscopy Silicon
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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