NDLI: Plasma diagnostics on RF inductively coupled ion source

Content Provider	IEEE Xplore Digital Library
Author	Wei Guo Lanter, W. Wu, R.L.C. DeJoseph, C.A.
Copyright Year	1998
Description	Author affiliation: K-Syst. Corp., Beavercreek, OH, USA (Wei Guo)
Abstract	Summary form only given, as follows. A test bed for producing low density plasmas of high fractional ionization and evaluating various plasma diagnostics has been constructed. At present, the system consists of a 10 cm. diameter, commercially-built ion beam system, vacuum chamber, scanning Langmuir probe system, microwave interferometer, and quadrupole mass spectrometer. The ion beam system is made up of an inductively coupled, rf excited (13.56 MHz) discharge region with a pair of molybdenum extraction grids for forming the beam. Ion beam currents of up to 2.5 mA per centimeter squared are possible with ion energies from 50-1500 eV. The Langmuir probe system can be scanned radially across the ion beam and moved to three positions along the beam axis. Microwave interferometer measurements of the line-integrated electron density can also be made at these axial positions. Initial measurements have been made in an argon ion beam plasma with a total density of less than 3e13 particles per cubic centimeter. Measurements of charged particle densities in the beam as a function of radial position will be compared with line-integrated interferometer data. In addition, measurements of the electron energy distribution functions in the beam plasma will also be presented.
Starting Page	120
Ending Page	121
File Size	203401
Page Count	2
File Format	PDF
ISBN	0780347927
ISSN	07309244
DOI	10.1109/PLASMA.1998.677492
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasma diagnostics Radio frequency Ion sources Plasma measurements Ion beams Plasma density Density measurement Probes Position measurement Particle measurements
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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