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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Liu, A.G. Wang, X.F. Tang, B.Y. Chu, P.K. Ko, P.K. Cheng, Y.C. |
| Copyright Year | 1998 |
| Description | Author affiliation: Dept. of Phys. & Mater. Sci., City Polytech. of Hong Kong, Kowloon, Hong Kong (Liu, A.G.) |
| Abstract | Summary form only given. The high voltage and electromagnetic field environment poses a big challenge to a control system for plasma immersion ion implantation (PIII). The automation process must be immune to electric field interference produced by the high voltage pulse power supply, radio frequency plasma generator, MEVVA plasma sources, and so on. We have recently designed and installed a distributed control system, PIIIDCS, for Pill facility. Programmable logic controllers (PLC) are used as the field control stations because of their good anti-interference ability and good real time response. A DH-485 network is used as the communication link between the field controllers and the management station in order to improve the robustness and reliability of the system. The newly developed interface is designed to work in a graphic mode in Microsoft Windows 95. Test runs have shown that the system is reliable, flexible, and easy to operate. The development of this novel control system will expedite the development of commercial PIII instrumentation. |
| File Size | 77520 |
| File Format | |
| ISBN | 0780347927 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1998.677720 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1998-06-01 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Distributed control Plasma immersion ion implantation Control systems Pulsed power supplies Plasma sources Programmable control Communication system control Telecommunication network reliability Electromagnetic fields Voltage control |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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