NDLI: Atmospheric pressure plasma jet applications

Content Provider	IEEE Xplore Digital Library
Author	Park, J. Herrmann, H.W. Henins, L. Selwyn, G.S.
Copyright Year	1998
Description	Author affiliation: Los Alamos Nat. Lab., NM, USA (Park, J.)
Abstract	Summary form only given. The atmospheric pressure plasma jet (APPJ) is a non-thermal, high pressure plasma discharge that produces a high velocity effluent stream of highly reactive chemical species. The discharge operates on a feedstock gas (e.g. He/O/sub 2//H/sub 2/O) which flows between two concentric cylindrical electrodes: an outer grounded electrode and an inner electrode powered at 13.56 MHz RF. While passing through the plasma, the feedgas becomes excited, ionized or dissociated by electron impact. The fast-flowing effluent consists of ions and electrons, which are rapidly lost by recombination, highly reactive radicals (e.g. O, OH), and metastable species (e.g. O/sub 2/*). The metastable O/sub 2/, which is reactive to hydrocarbon and other organic species, has been observed through optical emission spectroscopy to decrease by a factor of 2 from the APPJ nozzle exit to a distance of 10 cm. Unreacted metastable O/sub 2/, and that which does not impinge on a surface, will then decay back to ordinary ground state O/sub 2/, resulting in a completely "dry", environmentally-benign form of surface cleaning. Applications such as removal of photoresist, oxide films and organic residues from wafers for the electronics industry, decontamination of civilian and military areas and personnel exposed to chemical or biological warfare agents, and paint (e.g. graffiti) removal are being considered.
File Size	88944
File Format	PDF
ISBN	0780347927
ISSN	07309244
DOI	10.1109/PLASMA.1998.677890
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Atmospheric-pressure plasmas Plasma applications Plasma chemistry Electrodes Metastasis Effluents Electrons Surface cleaning Chemicals Radio frequency
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in