NDLI: Hot-wire chemical vapor deposition of silicon nitride for multicrystalline silicon solar cells

Content Provider	IEEE Xplore Digital Library
Author	Goldbach, H.D. van der Werf, C.H.M. Loffler, J. Scarfo, A. Kylner, A.M.C. Stannowski, B. ArnoldBik, W.M. Weeber, A. Rieffe, H. Soppe, W.J. Rath, J.K. Schropp, R.E.I.
Copyright Year	2005
Description	Author affiliation: Debye Inst., Utrecht Univ., Netherlands (Goldbach, H.D.; van der Werf, C.H.M.; Loffler, J.; Scarfo, A.; Kylner, A.M.C.; Stannowski, B.; ArnoldBik, W.M.)
Abstract	A new regime of high rate deposition of silicon nitride by hot wire chemical vapor deposition was investigated. The present design of the filament arrangement and the showerhead gas supply system allows for virtually unlimited scale-up. The deposition rates obtained were in excess of 5 nm/s. The refractive index (n at 2 eV; wavelength /spl sim/630 nm) could be controlled from 1.90 /spl plusmn/ 0.05 to 2.5 /spl plusmn/ 0.05, by varying the SiH/sub 4/ flow and the extinction coefficient (k) at 3.1 eV (wavelength 400 nm) was < 0.007 for all films of interest. The layers were tested on multicrystalline silicon solar cells in order to assess their passivation and antireflection properties. The cells had state-of-the-art values for all photovoltaic parameters, similar to cells with a microwave plasma deposited SiN/sub x/ anti-reflection coating. An efficiency of 14.3% was reached using HWCVD-SiN/sub x/ for multi-crystalline Si solar cells with an industrial process using screen printing.
Sponsorship	IEEE Electron Devices Soc. (USA)
Starting Page	1249
Ending Page	1252
File Size	695276
Page Count	4
File Format	PDF
ISBN	0780387074
ISSN	01608371
DOI	10.1109/PVSC.2005.1488366
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-01-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Chemical vapor deposition Photovoltaic cells Wire Refractive index Extinction coefficients Optical films Testing Passivation Photovoltaic systems
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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